Transport LImited growth: Reactlon Imited growth a hc 3DC 37v.C VRe kC N 2LN 4LN Most cyD is done hn this lImit where gas dynamIcs, AG-free energy change In reactlon reactor deslgn are Important. (△G≡△ H for gas Remedy for boundary layer becasue gas reaction no AS Susceptor,30-10° More uniform u Cholce of reactants and uniform film growth rate, V temperature are cntc Mon.. Sept. 15. 2003Transport limited growth : Reaction limited growth : h C 3DC 3lv C Re kC C - DG g x g g kT v = g g Æ Re = v = s g = k0e Nf 2LNf 4LNf Nf Nf Most CVD is done in this limit where gas dynamics, ∆G = free energy change in reaction reactor design are important. (∆G @ ∆H for gas becasue gas reaction no ∆S) 3o -10o B A J2 Remedy for boundary layer Susceptor, More uniform ug, C fi Choice of reactants and g uniform film growth rate , v temperature are critical Mon., Sept. 15, 2003 11