Stopping power in lon Implantation At each impact, the ion loses some energy. It travels through a vertical projected range R, before stopping. It transfers energy to target via both electronic and nuclear interactions Viscosity Transitions Nuclear non-local Coulomb electrons electrons colliSions velocity R More effective at larger v More effective at smaller substrate E r= dx (E)+S(E) 3.155J/6.152J.2003Stopping power in Ion Implantation At each impact, the ion loses some energy. It travels through a vertical projected range R p before stopping. It transfers energy to target via both electronic and nuclear interactions Viscosity, Transitions, Nuclear non-local local Coulomb electrons electrons collisions substrate velocity More effective at larger vion More effective at smaller vion Rp Rp = dx 0 R Ú = 1 N dE Sn ( ) E + S 0 e ( ) E E0 Ú 3.155J/6.152J, 2003 12