How small would you like to go?...and can you go? with semiconductors?. with lithography 6.12J/3.155J Microelectronic processing Semiconductor scaling drivers: Speed of light in global interconnects, vac/vK Increased information density ◆ Increased logic speed ◆ Economies of scale Semiconductor scaling challenges diffusion length control, statistics, especially for channe Thermal management, V2/R Power density: Pentium: Pentium Il Pentium Il: Nuclear Reactor Dielectric breakdown field, vd ◆ Interconnect cross-talk, delay,C↓,T=LC Information stability: kBT< CV2 Screening lengths(range of band bending, depletion regions Dec.10,2003D e c. 10 , 2 0 0 3 6.12J / 3.155J Microelectronic processing How small would you like to go? …and can you go? with semiconductors?…with lithography? Semiconductor scaling drivers: w Speed of light in global interconnects, v µ c/√k w Increased information density w Increased logic speed w Economies of scale Semiconductor scaling challenges: w diffusion length control, statistics, especially for channel w Thermal management, V 2/R Power density: Pentium: Pentium III :: Pentium III: Nuclear Reactor w Dielectric breakdown field, V/d w Interconnect cross-talk, delay, CØ , t = L/C w Information stability: kBT < CV 2 w Screening lengths (range of band bending, depletion regions)