电子束与固态样品相互作用 SEM Incident high-kV beam Secondary electrons (SE) Backscattered electrons (BSE) Characteristic X-rays EDS/WDS Auger Visible electrons Light Absorbed' Electron-hole electrons pairs Bremsstrahlung Specimen X-rays Elastically Inelastically scattered Direct scattered electrons Beam electrons 2 TEM2 EDS/WDS SEM 电子束与固态样品相互作用 TEM