扫描电镜工作原理和构造 Acceleration voltage Cathode Wehnelt cylinder Anode 卤 Screen:Brightness Condensor lens 1 FASTX is proportional to Condensor lens 2 START SE or BSE signal 区 SLOW Scan generator Deflection coils END (X and Y (scan) deflection) Objective lens Amplifiers ←BSE detector SE detector Secondary Back-scattered electrons(SE electrons Probe (BSE) 3扫描电镜工作原理和构造 3