D0L:10.13374.issn1001-053x.2013.12.011 第35卷第12期 北京科技大学学报 Vol.35 No.12 2013年12月 Journal of University of Science and Technology Beijing Dec.2013 阴极弧离子镀TiA1SN涂层摩擦与磨损行为 孔德军，付贵忠，张垒，叶存冬 常州大学机械工程学院，常州213016 ☒通信作者，E-mail:kong-dejun@163.com 摘要采用阴极弧离子镀法在GH4169合金表面制备了TiA1SiN涂层，通过扫描电镜和能谱仪分析了其表面和界面 的形貌和能谱，用轮廓仪测试了涂层表面粗糙度.在往复式摩擦磨损试验机上进行了涂层摩擦与磨损实验，通过能谱仪 分析了涂层表面磨损后点能谱和面能谱，考察了TASN涂层的摩擦因数和磨损性能，对其磨损机理进行了讨论.实验 结果显示涂层表面组织结构较为致密，表面粗糙度为194.57m:涂层主要成分为Ti、Al、Si和N元素，Si原子细化了 TN和AN晶粒：涂层结合界面发生了化学反应和成分的相互扩散，其结合形式为化学结合：涂层摩擦因数平均值为 0.493,磨损形式为磨粒磨损：磨损痕迹面扫描结果表明，磨损后A1和Ti形成的氮化物减少，Si和N原子无明显的减 少现象，涂层耐磨性增强主要依赖于S和N形成的化合物 关键词镍合金：保护膜；阴极弧离子镀法：摩擦：磨损 分类号TG146.1+5:TG174.444 Friction-wear behaviors of TialSiN coatings prepared by cathodic arc ion plating KONG De-jur,FU Gui-zhong,ZHANG Lei,YE Cun-dong College of Mechanical Engineering.Changzhou University,Changzhou 213016,China Corresponding author,E-mail:kong-dejun@163.com ABSTRACT A TiAlSiN coating was prepared on the GH4169 alloy surface by cathodic arc ion plating,the mor- phologies and energy spectra of its surface and interface were analyzed by scanning electron microscopy and energy dispersive spectroscopy,respectively,and the surface roughness was tested by profilometry.Friction and wear test of the coating was performed on a reciprocating friction testing machine,the point energy spectra and plane energy spectra after wear were analyzed by energy dispersive spectroscopy,the friction coefficient and wear property of the coating were studied,and the wear mechanism was discussed.Experimental results show that the structure of the coating surface is compact and the surface roughness is 194.57 nm.The coating is mainly composed of Ti,Al,Si and N elements,and the grains of TiN and AlN are refined by Si atoms.Chemical reactions and mutual diffusion of elements occur in the coating interface,and the combining form is chemical bonding.The average friction coefficient of the coating is 0.493,and the wear form is abrasive wear.The plane scanning results of wear traces indicate that Al and Ti nitrides in the coating decreases after wear,Si and N atoms have no significant reduction,and the increase in wear resistance of the coatings is mainly dependent on the compound formed by Si and N atoms. KEY WORDS nickel alloys;protective coatings;cathodic arc ion plating:friction;wear GH4169合金是Ni-Cr-Fe基时效硬化型高温合动机以及地面燃气轮机的飞速发展，要求GH4169 金川，主要用于制造工作于650℃以下的涡轮盘、合金具有较低的摩擦因数和较高的抗磨损性能，因 压气机叶片、封严环等航空部件②.随着航空发此需要对其表面进行改性处理.涂层技术是材料表 收稿日期：2012-11-21 基金项目：江苏省科技支撑计划（工业）资助项目(BE2012066):中因学位与研究生教育学会研究课题(C1-2013Y07-051)第 35 卷 第 12 期 北 京 科 技 大 学 学 报 Vol. 35 No. 12 2013 年 12 月 Journal of University of Science and Technology Beijing Dec. 2013 阴极弧离子镀 TiAlSiN 涂层摩擦与磨损行为 孔德军 ，付贵忠，张垒，叶存冬 常州大学机械工程学院, 常州 213016 通信作者，E-mail: kong-dejun@163.com 摘 要 采用阴极弧离子镀法在 GH4169 合金表面制备了 TiAlSiN 涂层，通过扫描电镜和能谱仪分析了其表面和界面 的形貌和能谱，用轮廓仪测试了涂层表面粗糙度. 在往复式摩擦磨损试验机上进行了涂层摩擦与磨损实验，通过能谱仪 分析了涂层表面磨损后点能谱和面能谱，考察了 TiAlSiN 涂层的摩擦因数和磨损性能，对其磨损机理进行了讨论. 实验 结果显示涂层表面组织结构较为致密，表面粗糙度为 194.57 nm；涂层主要成分为 Ti、Al、Si 和 N 元素，Si 原子细化了 TiN 和 AlN 晶粒；涂层结合界面发生了化学反应和成分的相互扩散，其结合形式为化学结合；涂层摩擦因数平均值为 0.493，磨损形式为磨粒磨损；磨损痕迹面扫描结果表明，磨损后 Al 和 Ti 形成的氮化物减少，Si 和 N 原子无明显的减 少现象，涂层耐磨性增强主要依赖于 Si 和 N 形成的化合物. 关键词 镍合金；保护膜；阴极弧离子镀法；摩擦；磨损 分类号 TG146.1+5；TG174.444 Friction-wear behaviors of TiAlSiN coatings prepared by cathodic arc ion plating KONG De-jun , FU Gui-zhong, ZHANG Lei, YE Cun-dong College of Mechanical Engineering, Changzhou University, Changzhou 213016, China Corresponding author, E-mail: kong-dejun@163.com ABSTRACT A TiAlSiN coating was prepared on the GH4169 alloy surface by cathodic arc ion plating, the mor￾phologies and energy spectra of its surface and interface were analyzed by scanning electron microscopy and energy dispersive spectroscopy, respectively, and the surface roughness was tested by profilometry. Friction and wear test of the coating was performed on a reciprocating friction testing machine, the point energy spectra and plane energy spectra after wear were analyzed by energy dispersive spectroscopy, the friction coefficient and wear property of the coating were studied, and the wear mechanism was discussed. Experimental results show that the structure of the coating surface is compact and the surface roughness is 194.57 nm. The coating is mainly composed of Ti, Al, Si and N elements, and the grains of TiN and AlN are refined by Si atoms. Chemical reactions and mutual diffusion of elements occur in the coating interface, and the combining form is chemical bonding. The average friction coefficient of the coating is 0.493, and the wear form is abrasive wear. The plane scanning results of wear traces indicate that Al and Ti nitrides in the coating decreases after wear, Si and N atoms have no significant reduction, and the increase in wear resistance of the coatings is mainly dependent on the compound formed by Si and N atoms. KEY WORDS nickel alloys; protective coatings; cathodic arc ion plating; friction; wear GH4169 合金是 Ni-Cr-Fe 基时效硬化型高温合 金 [1]，主要用于制造工作于 650 ℃以下的涡轮盘、 压气机叶片、封严环等航空部件 [2] . 随着航空发 动机以及地面燃气轮机的飞速发展，要求 GH4169 合金具有较低的摩擦因数和较高的抗磨损性能，因 此需要对其表面进行改性处理. 涂层技术是材料表 收稿日期：2012-11-21 基金项目：江苏省科技支撑计划 (工业) 资助项目 (BE2012066); 中国学位与研究生教育学会研究课题 (Cl-2013Y07-051) DOI:10.13374/j.issn1001-053x.2013.12.011