Lead TeRuride PbTe 8.16 910 1050 Mo,Pt,Ta AlzO3.Gr RE Lead Titanate 7.52 Ta RF Lithium 181 0.53227 307 407 G Ta,SS Metal reacts quickly in air. Lithum Bromide 550 3.46 500 RF n=1.78 Lithaum Chloride LICI 605 2.07 400 RF Preheat gently to outgas.n=1.66 Lithium Fluoride UF 845 2.64 875 1020 1180 G Ni,Ta.Mo,W RF Lithium lodide 449 4.08 400 Mo,W RF n=1.g6 Lithium Oxide >1700 2.01 850 Pt.Ir RF n=1.6d Lutetium Lu 1633 9.84 1300 E Ta Al2O3 RF.DC Lutetium Oxide Lu203 9.42 1400 RF Decomposes. Temp("C)for Given MP Vap.Press.(Torr) Evaporation Techniques Material Symbol S/D (CI /em E,Bent Thermal Sources Sputter Comments 10 1 Cail Basket Crucible Magnesium Mg 649 1.74 185247327 W,Mo.Ta.Cb Al2O3 VC DC.RF Extremely high rates possible. Magnesium Aluminate MgAl2O 2135 3.6 G RF Natural spinel.n1.72 Magnesium Bromide MgBr2 700 3.72 450 Decomposes. 714 2.32 400 M RF Decomposes.n=1.67 Magneslum Fluoride MgFz 1261 2.93.2 1000 Mo,Ta A203 Magnesium lodide Mgl2 c637 4.43 200 RE Magnesium Oxide Mgo 2852 3.58 1300 C.Al2O3 RF,RF-R oxides.n~1.7 Manganese Mn 1244 s 7.20 507 572647 W.Ta.Mo Al2O Beo DC.RF Manganese Bromide MnBr2 4.39 500 RF Manganese Chloride 650 2.98 450 RF Manganese(ll)Oxide 1080 4.50 Manganese (IV)Ode MnO2 535 5.03 RE-R Loses oxygen at 535'C. Manganese Suffide MnS D 3.99 1300 Mo RE Decomposes.ns 2.70 Mercury Hg -39 13.55 -68 -42 6 Mercury Sulfide HgS 584 s 8.10 250 RF Decomposes.n=2.85,3.20 Molybdenum Mo 2610 10.2 159218222117 Ex DC.RF Films smooth,hard.Careful degas Molybdenum Boride MoB2 2100 7.12 P RF.DCLead Telluride PbTe 917 8.16 780 910 1050 - Mo, Pt, Ta - - Al2O3 , Gr RF Vapors toxic. Deposits aretellurium rich. Sputtering preferred or co-evaporate from two sources. Lead Titanate PbTiO3 - 7.52 - - - - Ta - - - RF - Lithium Li 181 0.53 227 307 407 G Ta, SS - - Al2O3 , BeO - Metal reacts quickly in air. Lithium Bromide LiBr 550 3.46 - - ~500 - Ni - - - RF n = 1.78 Lithium Chloride LiCl 605 2.07 - - 400 - Ni - - - RF Preheat gently to outgas. n = 1.66 Lithium Fluoride LiF 845 2.64 875 1020 1180 G Ni, Ta, Mo, W - - Al2O3 RF Rate control important for optical films. Preheat gently to outgas. n = 1.39 Lithium Iodide LiI 449 4.08 - - 400 - Mo, W - - - RF n = 1.96 Lithium Oxide Li2O >1700 2.01 - - 850 - Pt, Ir - - - RF n = 1.64 Lutetium Lu 1663 9.84 - - 1300 Ex Ta - - Al2O3 RF, DC - Lutetium Oxide Lu2O3 - 9.42 - - 1400 - Ir - - - RF Decomposes. Material Symbol MP (°C) S/D g/cm3 Temp.(°C) for Given Vap. Press. (Torr) Evaporation Techniques Sputter Comments 10-8 10-6 10-4 E-Beam Thermal Sources Boat Coil Basket Crucible Magnesium Mg 649 S 1.74 185 247 327 G W, Mo, Ta, Cb W W Al2O3 , VC DC, RF Extremely high rates possible. Magnesium Aluminate MgAl2O4 2135 3.6 - - - G - - - - RF Natural spinel. n = 1.72 Magnesium Bromide MgBr2 700 3.72 - - ~450 - Ni - - - RF Decomposes. Magnesium Chloride MgCl2 714 2.32 - - 400 - Ni - - - RF Decomposes. n = 1.67 Magnesium Fluoride MgF2 1261 2.9-3.2 - - 1000 Ex Mo, Ta - - Al2O3 RF Rate control and substrate heat important for optical films. Reacts with tungsten. Excellent with molybdenum. n = 1.38 Magnesium Iodide MgI2 <637 D 4.43 - - 200 - Ir - - - RF - Magnesium Oxide MgO 2852 3.58 - - 1300 G - - - C, Al2O3 RF, RF-R Evaporates in 10-3 Torr oxygen for stoichiometry. Tungsten gives volatile oxides. n~1.7 Manganese Mn 1244 S 7.20 507 572 647 G W, Ta, Mo W W Al2O3 , BeO DC, RF - Manganese Bromide MnBr2 - D 4.39 - - 500 - Incl - - - RF - Manganese Chloride MnCl2 650 2.98 - - 450 - Incl - - - RF - Manganese (III) Oxide Mn2O3 1080 4.50 - - - - - - - - - - Manganese (IV) Oxide MnO2 535 5.03 - - - P W - W - RF-R Loses oxygen at 535°C. Manganese Sulfide MnS - D 3.99 - - 1300 - Mo - - - RF Decomposes. n = 2.70 Mercury Hg -39 13.55 -68 -42 -6 - - - - - - - Mercury Sulfide HgS 584 S 8.10 - - 250 - - - - Al2O3 RF Decomposes. n = 2.85, 3.20 Molybdenum Mo 2610 10.2 1592 1822 2117 Ex - - - - DC, RF Films smooth, hard. Careful degas required. Molybdenum Boride MoB2 2100 7.12 - - - P - - - - RF, DC -