Molybdenum Carbide Mo,C 2687 8.9 RF,DC Evaporation of Mo(CO)s yields MoC. Molybdenum Disulfide MoS2 1185 4.80 50 RF Molybdenum Oxide MoO3 795 s 4.69 g00 Mo,Pt Mo Al203-BN RF Slight oxygen loss.n1.9 Molybdenum Silicide 2050 6.31 Decomposes. Nd 1021 7.01 731 871 1062 Ex Ta N203 DC.RF Low tantalum solubility. NdF3 1410 6.5 900G Mo.W Mo,Ta AH203 RF Very little decomposition.n-1.6 Neodymium Oxide Nd2O3 1900 724 1400G Ta,W ThO2 RF,RF-R films clear.E-beam Nichrome IV Ni/Cr 1395 8.50 847 9871217 Ex W.Ta DC.RF Nickel 1455 8.90 927 10721262 Ex Alloys with refractory metals.Forms Beo.VC DC.RF smooth adherent films. Nickel Bromide NiBr2 963 5.10 362 Indl RF Nickel Chloride 1001 s 3.55 444 Incl RF Nickel Oxide NIO 1984 6.67 ~1470 Al2O3 RF-R Dissodates on heating.n2.18 Nioblum Nb 2468 8.57 17281972287 Ex DC,RF Attacks tungsten source.n1.80 Nioblum Boride NbB. 29002) 6.97 RF,DC Nioblum Carbide NbC 3500 7.6 F RF,DC NbN 2573 8.4 RF,RF-R awegpoanotmh1o Niobium(间Odde Nho 7.30 1100 RF Nioblum (l)Oxide Nb203 1780 7.5 CR Nioblum(V)Oxide Nb2Os 1485 4.47 RF,RF-R n=195 Nioblum Telluride NbTe, 7.6 RF Composition varlable. Niobium-Tin NbaSn Ex RF,DC Co-evaporate from two sources. Osmium Os 2700 22.48 2170 2430 2760 F DC.RF Osmium Oxide 08z03 Deposits osmium in 10 Torr oxyoen. h Pd 1554 s 12.02 842 992 1192 Al2O3 BeO DC.RF Palladum Oxide Pdo 870 9.70 575 203 RF-R Decomposes. Parylene CaHa 300-400 1.1 /apor-depositable plastic. Permalloy NI/Fe 1395 8.7 947 10471307 G W AlO VC DC F,Fillm low in nickel. Phosphorus 44.1 1.82 327 361 402 A203 Material reacts violently in air.n214 Phosphorus Nitride 2.51 RF.RF-R Platinum 1772 2145 1292 1492 1747 C.Tho2 DC.RF Alloys with metals.Films so,poo adhesion. Platinum Oxide PHO与 450 10.2 RF-R Plutonium Pu 641 19.84 Toxic.radioactive. Molybdenum Carbide Mo2C 2687 8.9 - - - F - - - - RF, DC Evaporation of Mo(CO)6 yields Mo2C. Molybdenum Disulfide MoS2 1185 4.80 - - ~50 - - - - - RF - Molybdenum Oxide MoO3 795 S 4.69 - - ~900 - Mo, Pt - Mo Al2O3 , BN RF Slight oxygen loss. n = 1.9 Molybdenum Silicide MoSi2 2050 6.31 - - - - W - - - RF Decomposes. Neodymium Nd 1021 7.01 731 871 1062 Ex Ta - - Al2O3 DC, RF Low tantalum solubility. Neodymium Fluoride NdF3 1410 6.5 - - ~900 G Mo, W - Mo, Ta Al2O3 RF Very little decomposition. n = 1.6 Neodymium Oxide Nd2O3 ~1900 7.24 - - ~1400 G Ta, W - - ThO2 RF, RF-R Loses oxygen, films clear. E-beam preferred. n = 1.79 Nichrome IV Ni/Cr 1395 8.50 847 987 1217 Ex *** W W, Ta Al2O3 , VC, BeO DC, RF Alloys with refractory metals. Nickel Ni 1455 8.90 927 1072 1262 Ex W W W Al2O3 , BeO, VC DC, RF Alloys with refractory metals. Forms smooth adherent films. Nickel Bromide NiBr2 963 S 5.10 - - 362 - Incl - - - RF - Nickel Chloride NiCl2 1001 S 3.55 - - 444 - Incl - - - RF - Nickel Oxide NiO 1984 6.67 - - ~1470 - - - - Al2O3 RF-R Dissociates on heating. n = 2.18 Niobium Nb 2468 8.57 1728 1977 2287 Ex W - - - DC, RF Attacks tungsten source. n = 1.80 Niobium Boride NbB2 2900(?) 6.97 - - - - - - - - RF, DC - Niobium Carbide NbC 3500 7.6 - - - F - - - - RF, DC - Niobium Nitride NbN 2573 8.4 - - - - - - - - RF, RF-R Reactive. Evaporates niobium in 10-3 Torr nitrogen. Niobium (II) Oxide NbO - 7.30 - - 1100 - Pt - - - RF - Niobium (III) Oxide Nb2O3 1780 7.5 - - - - W - W - RF, DC, RF￾R - Niobium (V) Oxide Nb2O5 1485 4.47 - - - - W - W - RF, RF-R n = 1.95 Niobium Telluride NbTex - 7.6 - - - - - - - - RF Composition variable. Niobium-Tin Nb3Sn - - - - - Ex - - - - RF, DC Co-evaporate from two sources. Osmium Os 2700 22.48 2170 2430 2760 F - - - - DC, RF - Osmium Oxide Os2O3 - D - - - - - - - - - - Deposits osmium in 10-3 Torr oxygen. Palladium Pd 1554 S 12.02 842 992 1192 Ex W W W Al2O3 , BeO DC, RF Alloys with refractory metals. Rapid evaporation suggested. Palladium Oxide PdO 870 9.70 - - 575 - - - - Al2O3 RF-R Decomposes. Parylene C8H8 300-400 1.1 - - - - - - - - - Vapor-depositable plastic. Permalloy Ni/Fe 1395 8.7 947 1047 1307 G W - - Al2O3 , VC DC F, Film low in nickel. Phosphorus P 44.1 1.82 327 361 402 - - - - Al2O3 - Material reacts violently in air. n = 2.14 Phosphorus Nitride P3N5 - 2.51 - - - - - - - - RF, RF-R - Platinum Pt 1772 21.45 1292 1492 1747 Ex W W W C, ThO2 DC, RF Alloys with metals. Films soft, poor adhesion. Platinum Oxide PtO2 450 10.2 - - - - - - - - RF-R - Plutonium Pu 641 19.84 - - - - W - - - - Toxic, radioactive