Spatial resolution and detection limit 100% 10% TEM AES SEM Raman XPS XRD 1% FTIR 0.1% nano- SIMS WDS u-PIXE u-XRF XRF 100 ppm 10 ppm TOF-SIMS 1 ppm ICP-MS/ 100 ppb INAA SIMS LA-ICP-MS 10 ppb APT 1 ppb 100 ppt Nano Micro Bulk 10 ppt 0.1nm 1nm 10 nm 100nm 1μm 10m 100μm 1mm 1cm 目emental composition EDS EELS EBSD CL Structural information Surface and thin film analysis ED EDS SEM and TEM host multiple techniques http://www.ammrf.org.au/myscope/analysis/introduction/ TEM SEM3