X射线微区成分分析 Incident high kV beam of electrons Backscattered e Secondary e (SE) Characteristic (BSE) X-rays Auger e← Visible light Bulk(SEM) Absorbed e← →e-hole pairs Foil(TEM) Bremsstrahlung x-rays (noise) Elastically Inelastically Interaction scattered e scattered e Volume Direct (transmitted) beam Characteristic X-rays constitute a fingerprint of the local chemistry.4 X射线微区成分分析