Scanning Probe Lithography(SPL) Mechanical scratchin Anodization of si surface Electrochemical decomposition of self-assembled monolayer Electrofield induced chemical reaction Electrochemical reaction in solution using protected STM tips Optical or Optical-Assisted Lithography AFMDip-Pen Nanolithography DPN)Scanning Probe Lithography (SPL) • Mechanical scratching •Anodization of Si surface • Electrochemical decomposition of self-assembled monolayer • Electrofield induced chemical reaction • Electrochemical reaction in solution using protected STM tips •Optical or Optical-Assisted Lithography • AFM Dip-Pen Nanolithography (DPN)