Scanning Probe Microscope(SPM) Lithography Or Scanning Probe Lithography (SPl) Scanning Probe Microscope tip, such as an Atomic Force Microscope(AFM)or Scanning Tunneling Microscope(STM)tip, is used to locally modify a surface, much like a pen or knifeScanning Probe Microscope (SPM) Lithography Or Scanning Probe Lithography (SPL) A Scanning Probe Microscope tip, such as an Atomic Force Microscope (AFM) or Scanning Tunneling Microscope (STM) tip, is used to locally modify a surface, much like a pen or knife