Vapor pressure of elements employed in semiconductor materials. Dots correspond to melting points Rely on tables, attached: Pvapor>>Pvac Elemental metals easy to evaporate, but.y -2 alloys Differential Vapor compounds so use 2 crucibles or deposit multilayers and diffuse Oxides, nitrides deposit in oxygen (or other) partial p 00 400600800100015062000 6.152J3.155J TEMPERATURE (K6.152J/3.155J 7 Vapor pressure of elements employed in semiconductor materials. Dots correspond to melting points Rely on tables, attached: pvapor > > pvac, Elemental metals easy to evaporate, but… alloys compounds Differential pvapor so use 2 crucibles or deposit multilayers and diffuse Oxides, nitrides deposit in oxygen (or other) partial p