Now add evaporation source e-beam ooooo ooooo B field Resistive heater RF-induction heater △H Equilibrium vapor pressure py=po exp 4H= heat of vaporization Strong t dependence Work function ee Heat of vaporization solid 6.152J3.155J6.152J/3.155J 6 Now add evaporation source Equilibrium vapor pressure: ∆H = heat of vaporization pv = p0 exp − ∆H kBT       Strong T dependence e- + _  e-beam B field Resistive heater I RF-induction heater Work function e- Heat of vaporization solid V(x) free