METALLIZATION INTERCONNECTS Read: Plummer Chapter I 1; Campbell Chapter 15 Why do we need metallization?- To connect devices electrically to each other and to the outside world; power and data Local interconnect doped polySi, silicides Packaging Cu or Al(several mm per chip) Materials choices for interconnects, more complex multilayer interconnects ll/703 3.155J6.l52J Generic metallization layout ontact(local interconnect) ll/703 3.155J6.l52JMETALLIZATION, INTERCONNECTS Read: Plummer Chapter 11; Campbell Chapter 15 Why do we need metallization? - To connect devices electrically Local interconnects: • gate contacts: doped polySi, silicides Inter-level to each other and to the outside world; power and data. • plugs, vias, e.g. W Packaging • Longer range interconnects: Cu or Al (several mm per chip) Materials choices for interconnects, more complex multilayer interconnects. 11/17/03 3.155J/6.152J 1 Generic metallization layout gate contact (local interconnect) Plug, via metal lines (global interconnects) 11/17/03 3.155J/6.152J 2 1