CVD Processes Bulk transport tansport of byproduct Reactan molecule ○ Duluson of 2) Transport Carrier gas (g)byproduct across andry (Maintain hi p, cO slow reaction d layer Decomposition 1∝D△C sorption O Reaction with film Surface diffusion Mon., Sept. 15, 2003CVD Processes 8 1 Bulk Bulk transport transport of byproduct Reactant molecule 7 Diffusion of Transport Carrier gas 2 across bndry 4 (g) byproduct (Maintain hi p, layer Decomposition slow reaction) 6 Desorption 3 Adsorption 5 J1 µDgDC Reaction with film J2 ~ kiCi Surface diffusion Mon., Sept. 15, 2003 4