几种工艺的比较 PARAMETER CZ FLOAT ZONE Large Crystal Yes Difficult Cost Lower Dislocations 0-10/cm2 103-105/cm Resistivity Up to 100 ohm. 2000 ohm-cm c Max Radial Resistivity 5-10% 5-10% Oxygen Content 1018-1018 0-Very Low atoms/cm3• 几种工艺的比较