1.Why CMOS? D.Cost Productivity Cost Drivers by Node Cost Drivers by Node Cost Drivers by Node 6.00 4.50 4.50 Equipment includes 4.00 4.00 5.00 depreciation, 3.50 3.50 maintenance 4.00 3.00 3.00 and facilities 2.50 3.00 2.00 annelay 2.00 2.00 1.50 1.50 1.00 1.00 1.00 0.50 0.50 0.00 0.00 0.00 Node Node Node Equipment Materials -Patterning -Non Patterning Patterning:光刻工序 FEOL:前端工序（器件层） Non Patterning:非光刻工序 BEOL:后端工序（互连层） (Back-end-of-line)1. Why CMOS? D. Cost & Productivity Patterning:光刻工序 Non Patterning:非光刻工序 FEOL:前端工序（器件层） BEOL:后端工序（互连层） (Back-end-of-line)