SUPPLEMENTARY INFORMATION D0:10.1038/NMAT2858 Edge (-O-) 1v(0- 10 (800cm1) FWHM 0850℃(G0-3L) ('n 'e)aouequosqv (100cm-1) (m)750℃(G0-3L) (im850℃(Sio /Si) (Si-OH) 800 1000 1200 1400 (a)850C:750C(G0-3L) 5x103 (b)850℃：750℃(Si0,/Si) 6009001200150018002100240027003000330036003900 Wavenumber(cm-1) Supplementary Figure S2 Transmission infrared differential (a)and absorbance (i-ii) spectra of GO (three layers:3L)at high temperatures(850-750C).A new peak appears at 800 cm with fwhm of-100 cm.A loss corresponding to Si-OH was observed at~980 cm. The inset shows the absorbance spectra at 750C (i)and 850C (ii)anneals for single layer GO and (iii)bare clean SiO2/Si surface at 850C referenced to the room temperature clean SiOz/Si surface.Absorbance unit is abbreviated as 'a.u.'. 4 NATURE MATERIALS www.nature.com/naturematerials4 nature MATERIALS | www.nature.com/naturematerials supplementary information doi: 10.1038/nmat2858 4 Supplementary Figure S2 Transmission infrared differential (a) and absorbance (i-ii) spectra of GO (three layers: 3L) at high temperatures (850-750°C). A new peak appears at 800 cm-1 with fwhm of ~100 cm-1. A loss corresponding to Si-OH was observed at ~980 cm-1. The inset shows the absorbance spectra at 750°C (i) and 850°C (ii) anneals for single layer GO and (iii) bare clean SiO2/Si surface at 850°C referenced to the room temperature clean SiO2/Si surface. Absorbance unit is abbreviated as ‘a. u.’