Chiolote 2.9 -800· Mo.W RF n=1.33 Chromium 1857 s7.20 8379771157G RF,DC E0gteyadherentHghrates Chromium Boride CrB 2760(2) 6.17 RF.DC Chromium Bromide CrBr2 842 4.36 550 RF 1980 6.68 -2000F RF.DC Chromium Chloride 824 2.88 550 Fe.Iincl RF Chromium Oxide Cr203 2266 5.21 -2000G W.Mo RF,RF-R oportionates to lower oxides: reoxidizes at 600C in air.n2.55 Chromium Sillcide 5.5 RF,DC oie-sacon Cr-SiO 、 人 w DC.RF Flash. Cobalt Co 1495 8.98509901200Ex w.Nb Al203.BeO IDC.RF Alloys with refractory metals. Cobalt Bromide CoBr2 678 D4.91 、 400 Iincl RF Cobalt Chloride CoCk 724 D3.36 472 RF Cobalt Oxide 1795 6.45 、 DC-R.RF. Sputter preferred. Copper Cu 1083 8.92 727 857 1017e Mo Al2Og.Mo.Ta DC.RF Copper Chloride CuCI 430 4.14 -600 RF n=1.93 Copper Oxide Cu2O 1235 s 6.0 600G Ta DC-R,RF- n=2.71 Copper Sulfide Cu2S 1100 5.6 Cryollte 1000 2.91020h2601480 w.Mo.Ta w.Mo.TavC RE egengonsnreduceptang.Lne Dysprosium Dy 1412 8.55625750900G Ta RF.DC Dysprosium Fluoride DyF3 1360 s -800G Ta RF Dysproslum Oxide Dy203 2340 7.81 -1400 RF,RF-R Loses oxygen. Erblum 1529 s9.07 650775930G w.Ta DC,RF Erblum Fluorde ErF3 1350 750 IMo RF VsT1g85:A362320 Erbium Oxide E03 Infus. 8.64 .-1600 RF.RF-R Loses oxygen. Europlum Eu 822 s5.24280360480F w.Ta A203 RF,DC Low tantalum solubility. Europlum Fluoride EuF? 1380 6.50 950 o RE Europlum Oxide Eu203 7.42 1600G ir.Ta.W ThO2 RF,RF-R Loses oxygen.Films clear and hard. 5.75 RF Material S/D Temp.(C)for Given Evaporation Techniques Sputter Commen本 Vap.Press.(Torr) Chiolote Na5Al3F14 - 2.9 - - ~800 - Mo, W - - - RF n = 1.33 Chromium Cr 1857 S 7.20 837 977 1157 G ** W W VC RF, DC Films very adherent. High rates possible. Chromium Boride CrB 2760(?) 6.17 - - - - - - - - RF, DC - Chromium Bromide CrBr2 842 4.36 - - 550 - Incl - - - RF - Chromium Carbide Cr3C2 1980 6.68 - - ~2000 F W - - - RF, DC - Chromium Chloride CrCl2 824 2.88 - - 550 - Fe, Incl - - - RF - Chromium Oxide Cr2O3 2266 5.21 - - ~2000 G W, Mo - W - RF, RF-R Disproportionates to lower oxides; reoxidizes at 600°C in air.n = 2.55 Chromium Silicide Cr3Si2 - 5.5 - - - - - - - - RF, DC - Chromium-Silicon Monoxide Cr-SiO - S * * * * G W - W - DC, RF Flash. Cobalt Co 1495 8.9 850 990 1200 Ex W, Nb - W Al2O3 , BeO DC, RF Alloys with refractory metals. Cobalt Bromide CoBr2 678 D 4.91 - - 400 - Incl - - - RF - Cobalt Chloride CoCl2 724 D 3.36 - - 472 - Incl - - - RF - Cobalt Oxide CoO 1795 6.45 - - - - - - - - DC-R, RF￾R Sputter preferred. Copper Cu 1083 8.92 727 857 1017 Ex Mo W W Al2O3 , Mo, Ta DC, RF Adhesion poor. Use interlayer (Cr). Evaporates using any source material. Copper Chloride CuCl 430 4.14 - - ~600 - - - - - RF n = 1.93 Copper Oxide Cu2O 1235 S 6.0 - - ~600 G Ta - - Al2O3 DC-R, RF￾R n = 2.71 Copper Sulfide Cu2S 1100 5.6 - - - - - - - - - - Cryolite Na3AlF6 1000 2.9 1020 1260 1480 Ex W, Mo, Ta - W, Mo, Ta VC RF Large chunks reduce spitting. Little decomposition. Dysprosium Dy 1412 8.55 625 750 900 G Ta - - - RF, DC - Dysprosium Fluoride DyF3 1360 S - - - ~800 G Ta - - - RF - Dysprosium Oxide Dy2O3 2340 7.81 - - ~1400 - Ir - - - RF, RF-R Loses oxygen. Erbium Er 1529 S 9.07 650 775 930 G W, Ta - - - DC, RF - Erbium Fluoride ErF3 1350 - - - ~750 - Mo - - - RF JVST. 1985;A3(6):2320. Erbium Oxide Er2O3 Infus. 8.64 - - ~1600 - Ir - - - RF, RF-R Loses oxygen. Europium Eu 822 S 5.24 280 360 480 F W, Ta - - Al2O3 RF, DC Low tantalum solubility. Europium Fluoride EuF2 1380 6.50 - - ~950 - Mo - - - RF - Europium Oxide Eu2O3 - 7.42 - - ~1600 G Ir, Ta, W - - ThO2 RF, RF-R Loses oxygen. Films clear and hard. Europium Sulfide EuS - 5.75 - - - G - - - - RF - Material Symbol MP (°C) S/D g/cm3 Temp.(°C) for Given Vap. Press. (Torr) Evaporation Techniques Sputter Comments