Boron Oxide B.O3 -450 1.81 -1400G Pt Mo n=1.48 Boron Sulfide B2Sa 310 1.55 800 Gr RF Cadmium 321 8.64 64 120180p W.Mo.Ta W.Mo.Ta Al2Oa.Q DC,RF .Low Cadmium Antimonide CdaSba 456 6.92 Cadmium Arsenide CdaAs2 721 6.21 Cadmium Bromide CdBr2 567 5.19 -300 Cadmium Chioride 568 4.05 -400 CdF2 1100 6.64 500 RF n=1.56 Cadmlum lodide 387 5.67 小250 Cadmeum Odde Cao >1500 D6.95 -530 RF-R Discrocortionates ne 2.49 Cadmium Selenide Cdse 31350 s5.81 540G Mo,Ta A203.Q RF Evaporates easily.n2.4 Cadmium Sulfide CdS 1750 4.82 550 W.Mo.Ta RF rariable.n #251.253 CdTe 1121 5.85 450 W.Mo.Ta w W.Ta.Mo RF Ca 839 s1.54272357 459P w ALO3.Q Corrodes in air. Calcium Fluoride CaF2 1423 3.18 、 ~1100 W.Mo.Ta W.Mo.Ta w,Mo,Ta Q Rate control important.Preheat gently to outgas.n 1.43 Calcium Oxide Cao 2614 3.3 -1700 W.Mo RF,RF-R Calclum Silicate CaSiOa 1540 2.91 -G RF n=1.61.1.66 Calcium Sulide Cas D2.5 -1100- Mo RF Decomposes.n2.14 Calclum Ttanate CaTIO3 1975 4.101490 16001690P Calcium Tungstate Cawo4 6.06 RF n=1.92 Carbon 3652 s 1.8-2.1165718672137Ex Poor film adhesion. Cerium Ce 798 6.70 g70 150h380 W.Ta W.Ta B0. DC.RF CeF3 1460 6.16 900G W.Mo.Ta Mo.Ta RF Preheat gently to outgas.n~1.7 Cerium (lll)Oxide 1692 6.86 Cerium (IV)Oxide CeO2 2600 7.13189020002310G w RF,RF-R Very little decomoosition. Ceslum Cs 28 1.88 -16 2280 ss Cesium Bromide CsBr 636 3.04 -400 w RF n=1.70 Cesium Chlonide CsCl 645 3.99 500 w n=1.64 Cesium Fluoride 682 4.12 -500 RF n=1.48 Cesium Hydroxide CsOH 272 3.68 550 Pt Cesium lodide Csl 626 4.51 ..500 RF n=1.79Boron Oxide B2O3 ~450 1.81 - - ~1400 G Pt, Mo - - - - n = 1.48 Boron Sulfide B2S3 310 1.55 - - 800 - - - - Gr RF - Cadmium Cd 321 8.64 64 120 180 P W, Mo, Ta - W, Mo, Ta Al2O3 , Q DC, RF Bad for vacuum systems. Low sticking coefficient. Cadmium Antimonide Cd3Sb2 456 6.92 - - - - - - - - - - Cadmium Arsenide Cd3As2 721 6.21 - - - - - - - Q RF - Cadmium Bromide CdBr2 567 5.19 - - ~300 - - - - - - - Cadmium Chloride CdCl2 568 4.05 - - ~400 - - - - - - - Cadmium Fluoride CdF2 1100 6.64 - - ~500 - - - - - RF n = 1.56 Cadmium Iodide CdI2 387 5.67 - - ~250 - - - - - - - Cadmium Oxide CdO >1500 D 6.95 - - ~530 - - - - - RF-R Disproportionates. n = 2.49 Cadmium Selenide CdSe >1350 S 5.81 - - 540 G Mo, Ta - - Al2O3 , Q RF Evaporates easily. n = 2.4 Cadmium Sulfide CdS 1750 S 4.82 - - 550 F W, Mo, Ta - W Al2O3 , Q RF Sticking coefficient affected by substrate temperature. Stoichiometry variable. n = 2.51, 2.53 Cadmium Telluride CdTe 1121 5.85 - - 450 - W, Mo, Ta W W, Ta, Mo - RF Stoichiometry depends on substrate temperature. n~ 2.6 Calcium Ca 839 S 1.54 272 357 459 P W W W Al2O3 , Q - Corrodes in air. Calcium Fluoride CaF2 1423 3.18 - - ~1100 - W, Mo, Ta W, Mo, Ta W, Mo, Ta Q RF Rate control important. Preheat gently to outgas. n = 1.43 Calcium Oxide CaO 2614 ~3.3 - - ~1700 - W, Mo - - ZrO2 RF, RF-R Forms volatile oxides with tungsten and molybdenum. n = 1.84 Calcium Silicate CaSiO3 1540 2.91 - - - G - - - Q RF n = 1.61, 1.66 Calcium Sulfide CaS - D 2.5 - - 1100 - Mo - - - RF Decomposes. n = 2.14 Calcium Titanate CaTiO3 1975 4.10 1490 1600 1690 P - - - - RF Disproportionates except in sputtering. n = 2.34 Calcium Tungstate CaWO4 - 6.06 - - - G W - - - RF n = 1.92 Carbon C ~3652 S 1.8-2.1 1657 1867 2137 Ex - - - - RF E-beam preferred. Arc evaporation. Poor film adhesion. Cerium Ce 798 ~6.70 970 1150 1380 G W, Ta W W, Ta Al2O3 , BeO, VC DC, RF - Cerium Fluoride CeF3 1460 6.16 - - ~900 G W, Mo, Ta - Mo, Ta - RF Preheat gently to outgas. n ~ 1.7 Cerium (III) Oxide Ce2O3 1692 6.86 - - - F W - - - - Alloys with source. Use 0.015"-0.020" tungsten boat. n = 1.95 Cerium (IV) Oxide CeO2 ~2600 7.13 1890 2000 2310 G W - - - RF, RF-R Very little decomposition. Cesium Cs 28 1.88 -16 22 80 - SS - - Q - - Cesium Bromide CsBr 636 3.04 - - ~400 - W - - - RF n = 1.70 Cesium Chloride CsCl 645 3.99 - - ~500 - W - - - RF n = 1.64 Cesium Fluoride CsF 682 4.12 - - ~500 - W - - - RF n = 1.48 Cesium Hydroxide CsOH 272 3.68 - - 550 - Pt - - - - - Cesium Iodide CsI 626 4.51 - - ~500 - W - - Pt, Q RF n = 1.79