A brief history of facility In 1948 a prototype wavelength dispersive spectrometer was developed. In 1949 the first microprobe was built by Raymond Castaing,the father of X-ray microanalysis. ● 1956-first commercial Electron Probe Microanalyzer(EPMA)was developed in France- static electron probe. 1956-scanning EPMA developed in England. Late 1960s development of solid (Si(Li))state EDS detectors. Late 1960s EDS detector attached to an SEM. 20A brief history of facility • In 1948 a prototype wavelength dispersive spectrometer was developed. • In 1949 the first microprobe was built by Raymond Castaing, the father of X-ray microanalysis. • 1956 - first commercial Electron Probe Microanalyzer (EPMA) was developed in France - static electron probe. • 1956 - scanning EPMA developed in England. • Late 1960s development of solid (Si(Li)) state EDS detectors. • Late 1960s EDS detector attached to an SEM. 20