6.152J3.155J CRYSTAL GROWTH 6.12J/3.155J Microelectronic processing COnfined CZ Meniscus controlle Zone Pull from freezing solution horizontal 00● vertical 团B2O3 N。v.26,20036.152J/3.155J 7 13 Nov.26 , 2003 6.12J / 3.155J Microelectronic processing CRYSTAL GROWTH 1 Confined Normal freezing (Bridgman) Crystal horizontal vertical Crystal B2O3 Si 2 CZ Meniscus controlled LEC Pull from solution Crystal Crystal Floating zone feed rod high-purity crystal 3 Zone melting poly poly