·212* 北京科技大学学报 第36卷 所示.可以发现，压痕深度小于薄膜厚度的1/10，测 ketone.Biomaterials,2010,31(32):8181 试结果可以认为不受基体的影响.薄膜的杨氏模量 B]Roy M E,Whiteside L A,Katerberg B J.Diamond-ike carbon 的平均值为60.31GPa. coatings enhance scratch resistance of bearing surfaces for use in joint arthroplasty:hard substrates outperform soft.Biomed Mater 10 Res Part B,2009,89(2):527 Dragoshanskii Y N,Pudov V I.Influence of laser processing and 65E-60.31GPa magnetically active inorganic coatings on the dynamic magnetic properties of soft-magnetic materials.Inorg Mater,2013,49(7): 668 60 5]Li X D,Bhushan B.Micromechanical and tribological character- ization of hard amorphous carbon coatings as thin as 5 nm for mag- 55 netic recording heads.Wear,1998,220(1):51 [6]Caliskan H,Kurbanoglu C,Panjan P,et al.Wear behavior and 065060708090100110 cutting performance of nanostructured hard coatings on cemented 最大压痕深度/m carbide cutting tools in hard milling.Tribol Int,2013,62:215 图A1利用纳米压痕法测试薄膜的杨氏模量 ]Piska M.Hard nano-erystalline coatings for cutting tools.Mater Fig.Al Elastic modulus of thin films measured by nanoindentation Sei Forum,2008,567/568:185 Nouveau C,Labidi C,Collet R,et al.Effect of surface finishing A2 such as sand-blasting and CrAIN hard coatings on the cutting 在压痕实验前，一般通过在表面光滑的熔融石 edge's peeling tools'wear resistance.Wear,2009,267 (58): 英上测量面积公式$-9来确定压头尖端的形状. 1062 通过测量不同的接触深度h。,来拟合压头尖端的面 9)] Sokovic M,Barisic B,Sladic S.Model of quality management of 积，如下式所示： hard coatings on ceramic cutting tools.I Mater Process Technol, 2009,209(8):4207 A=Coh2+C he+C2hi+C3h.(A1) [10]Li X D,Diao D F,Bhushan B.Fracture mechanisms of thin 式中，C、C1、C2和C3为曲线拟合常数，其值分别为 amorphous carbon films in nanoindentation.Acta Mater,1997, 2.598、2985.9、-25715和53181.如图A2所示，当 45(11):4453 压痕深度小于15nm时，压头较钝，与球冠类似，可 [11]Chen JJ.Indentation-based methods to assess fracture toughness 用A=2πRh.来描述，其中R=207.4nm为球冠的 for thin coatings.J Phys D,2012,45(20):article No.203001 半径.随着接触深度的增加，压头过渡为锥形形状. [12]Bull S J.Analysis methods and size effects in the indentation fracture toughness ass ssment of very thin oxide coatings on glass 10 。实验数据 C R Mec,2011,339(7/8):518 使用所有实验数据拟合 [13]den Toonder J,Malzbender J,de With G,et al.Fracture tough- 一使用h<15nm的实验数据拟合 ness and adhesion energy of sol-gel coatings on glass.J Mater A=C2+Ch+Ch+C Res,2002,17(1):224 [14]Chai H.Fracture mechanics analysis of thin coatings under 一A-2πRH spherical indentation.Int J Fracture,2003,119(3):263 [15]Yin Y,Fisher K,Nosworthy N J,et al.Comparison on protein adsorption properties of diamond-ike carbon and nitrogen-contai- ning plasma polymer surfaces.Thin Solid Films,2012,520(7): 19o 3021 101 10 10 压痕接触深度m [16]Florando J N,Nix W D.A microbeam bending method for stud- ying stressstrain relations for metal thin films on silicon sub- 图A2利用面积公式确定锥形压头尖端形状 strates.J Mech Phys Solids,2005,53(3):619 Fig.A2 Determining the shape of the conical indenter tip by the area 07] Oliver W C,Pharr G M.Measurement of hardness and elastic function modulus by instrumented indentation:advances in understanding and refinements to methodology.JMater Res,2004,19(1):3 参考文献 [18]Bei H,George EP,Hay JL,et al.Influence of indenter tip ge- [Balaceanu M,Petreus T,Braic V,et al.Characterization of Zr- ometry on elastic deformation during nanoindentation.Phys Rer based hard coatings for medical implant applications.Surf Coat Lett,2005,95(4)article No.045501 Technol,.2010,204(12/13):2046 9] Chang L ZhangLC.Mechanical behaviour characterisation of sili- Wang H Y,Xu M,Zhang W,et al.Mechanical and biological con and effect of loading rate on pop-in:a nanoindentation study un- characteristics of diamond-ike carbon coated poly aryl-ether-ether- der ultra-ow loads.Mater Sci Eng A,2009,506(1/2):125北 京 科 技 大 学 学 报 第 36 卷 所示． 可以发现，压痕深度小于薄膜厚度的 1 /10，测 试结果可以认为不受基体的影响． 薄膜的杨氏模量 的平均值为 60. 31 GPa． 图 A1 利用纳米压痕法测试薄膜的杨氏模量 Fig． A1 Elastic modulus of thin films measured by nanoindentation A2 在压痕实验前，一般通过在表面光滑的熔融石 英上测量面积公式［18--19］来确定压头尖端的形状． 通过测量不同的接触深度 hc，来拟合压头尖端的面 积，如下式所示: A = C0 h2 c + C1 hc + C2 h1 /2 c + C3 h1 /4 c ． ( A1) 式中，C0、C1、C2和 C3为曲线拟合常数，其值分别为 2. 598、2985. 9、－ 25715 和 53181． 如图 A2 所示，当 压痕深度小于 15 nm 时，压头较钝，与球冠类似，可 用 A = 2πＲhc 来描述，其中 Ｒ = 207. 4 nm 为球冠的 半径． 随着接触深度的增加，压头过渡为锥形形状． 图 A2 利用面积公式确定锥形压头尖端形状 Fig． A2 Determining the shape of the conical indenter tip by the area function 参 考 文 献 ［1］ Balaceanu M，Petreus T，Braic V，et al． Characterization of Zr￾based hard coatings for medical implant applications． Surf Coat Technol，2010，204( 12 /13) : 2046 ［2］ Wang H Y，Xu M，Zhang W，et al． Mechanical and biological characteristics of diamond-like carbon coated poly aryl-ether-ether￾ketone． Biomaterials，2010，31( 32) : 8181 ［3］ Ｒoy M E，Whiteside L A，Katerberg B J． Diamond-like carbon coatings enhance scratch resistance of bearing surfaces for use in joint arthroplasty: hard substrates outperform soft． J Biomed Mater Ｒes Part B，2009，89( 2) : 527 ［4］ Dragoshanskii Y N，Pudov V I． Influence of laser processing and magnetically active inorganic coatings on the dynamic magnetic properties of soft-magnetic materials． Inorg Mater，2013，49( 7) : 668 ［5］ Li X D，Bhushan B． Micromechanical and tribological character￾ization of hard amorphous carbon coatings as thin as 5 nm for mag￾netic recording heads． Wear，1998，220( 1) : 51 ［6］ al爧kan H，Kurbanoglu C ˇ ，Panjan P，et al． Wear behavior and cutting performance of nanostructured hard coatings on cemented carbide cutting tools in hard milling． Tribol Int，2013，62: 215 ［7］ Piska M． Hard nano-crystalline coatings for cutting tools． Mater Sci Forum，2008，567 /568: 185 ［8］ Nouveau C，Labidi C，Collet Ｒ，et al． Effect of surface finishing such as sand-blasting and CrAlN hard coatings on the cutting edge's peeling tools' wear resistance． Wear，2009，267 ( 5-8 ) : 1062 ［9］ Sokovic M＇ ，Bariic B＇ ，Sladic S． Model of quality management of ＇ hard coatings on ceramic cutting tools． J Mater Process Technol， 2009，209( 8) : 4207 ［10］ Li X D，Diao D F，Bhushan B． Fracture mechanisms of thin amorphous carbon films in nanoindentation． Acta Mater，1997， 45( 11) : 4453 ［11］ Chen J J． Indentation-based methods to assess fracture toughness for thin coatings． J Phys D，2012，45( 20) : article No． 203001 ［12］ Bull S J． Analysis methods and size effects in the indentation fracture toughness assessment of very thin oxide coatings on glass． C Ｒ Mec，2011，339( 7 /8) : 518 ［13］ den Toonder J，Malzbender J，de With G，et al． Fracture tough￾ness and adhesion energy of sol-gel coatings on glass． J Mater Ｒes，2002，17( 1) : 224 ［14］ Chai H． Fracture mechanics analysis of thin coatings under spherical indentation． Int J Fracture，2003，119( 3) : 263 ［15］ Yin Y，Fisher K，Nosworthy N J，et al． Comparison on protein adsorption properties of diamond-like carbon and nitrogen-contai￾ning plasma polymer surfaces． Thin Solid Films，2012，520( 7) : 3021 ［16］ Florando J N，Nix W D． A microbeam bending method for stud￾ying stress-strain relations for metal thin films on silicon sub￾strates． J Mech Phys Solids，2005，53( 3) : 619 ［17］ Oliver W C，Pharr G M． Measurement of hardness and elastic modulus by instrumented indentation: advances in understanding and refinements to methodology． J Mater Ｒes，2004，19( 1) : 3 ［18］ Bei H，George E P，Hay J L，et al． Influence of indenter tip ge￾ometry on elastic deformation during nanoindentation． Phys Ｒev Lett，2005，95( 4) : article No． 045501 ［19］ Chang L，Zhang L C． Mechanical behaviour characterisation of sili￾con and effect of loading rate on pop-in: a nanoindentation study un￾der ultra-low loads． Mater Sci Eng A，2009，506( 1/2) : 125 · 212 ·