This book is printed on acid-free paper. o Copyright e 1992 by Academic Press All rights reserved. No part of this publication may be reproduced or or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher Designed by Elizabeth E. Tustin ACADEMIC PRESS A Division of Harcourt Brace& Company 525 B Street, Suite 1900. San Diego. Califomia 92101.4495 United Kingdom Edition published b ACADEMIC PRESS LIMITED 24-28 Oval Road, London NWI 7DX Library of Congress Cataloging-in-Publication Data The materials science of thin films/ Milton Ohrin Includes bibliographical references and index ISBN 0-12-524990-X (Alk. paper) 1. Thin fIms. 1. Title TA4189.T450471991 62044-dc20 Printed in the United States of Amenca 9900020Mv10987This book is printed on acid-free paper. @ Copyright 0 1992 by Academic Pres No pari of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording. or any information storage and retrieval system, without permission in writing from the publisher. Designed by Elizabeth E. Tustian ACADEMIC PRESS A Division of Harcouri Brace d; Company 525 B Street, Suite 1900. San Diego, California 92101-4495 United Kingdom Uition published by ACADEMIC PRESS LIMITED 24-28 Oval Rod. London NWI 7DX All rights reserved. Library of Congress Cataloging-in-Publication Data Ohring. Milton, date. The materials science of thin films / Milton Ohring. Includes bibliograpbical references and indcx. ISBN 0-12-524990-X (Alk. paper) 1. Thin films. I. Title. TA418.9.T45oQ7 1991 p. cm. 620'.44-&20 91-9664 CIP Printed in the United States of America 99 00 01 02 03 MV11 10 9 8 7