Contents Acknowledgments Thin Films-A Historical Perspective A Review of Materials Science I 1. Introduction 1. 2. Structure 1. 3. Defects in Solids 10 1. 4. Bonding of Materials 1.5. Thermodynamics of Materials 21 neues 1. 7. Nucleation 40 1. 8. Conclusion 43 Exercises Referer Vacuum Science and Technology 49 2.1. Kinetic Theory of Gases 2. 2. Gas Transport and Pumping 55+ Contents Foreword ............................................. xi Preface .............................................. xiii ... Acknowledgments ..................................... xvii Thin Films - A Historical Perspective ........................ xix Chapter 1 A Review of Materials Science ......................... 1 1.1. Introduction ........................................ 1 1.2. Structure .......................................... 2 1.3. Defects in Solids .................................... 10 1.4. Bonding of Materials ................................. 14 1.5. Thermodynamics of Materials ........................... 21 1.6. Kinetics .......................................... 33 1.7. Nucleation ......................................... 40 1.8. Conclusion ........................................ 43 Exercises ......................................... 43 References ........................................ 46 Chapter 2 Vacuum Science and Technology ..................... 49 2.1. Kinetic Theory of Gases ............................... 49 2.2. Gas Transport and Pumping ............................. 55 V