·622· 北京科技大学学报 第33卷 (b) 15 10 5.50055785.6565.7345.8125.890 55w 5.89s■ 寿命s 图6黑硅μ-CD图(a)及少数载流子寿命分布图(b) a及少 Fg.diagram(a)and life plot of minority came(black silicon 图6 -PCD 参考文献 Gamett E,Yang P.Light trapping in silicon nanowire solar cells. Nano Lett,2010,10:1082 [Dobrzanski LA,Drygala A.Laser texturization in technology of 7]Lee C,Koker L,Kolasinski K W.A novel optical technique for multicrystalline silicon solar cells.J Achier Mater Manuf Eng, the estimation of porosity in porous silicon thin films.Appl Phys A, 2008,29(1):7 2000,71:77 [2]Liang Z C,Chen D M,Liang X Q,et al.Crystalline Si solar cells [8] Liu G Y,Tan X W,Yao J C,et al."Black silicon"antireflection based on solar grade silicon materials.Renen Energy,2010,35: thin film prepared by electrochemical etching.Acta Phys Sin, 2297 2008,57(1):514 B] Vitanov P,Goranova E.Stavrov V,et al.Fabrication of buried (刘光友，谭兴文，姚金才，等.电化学制备薄黑硅抗反射膜 contact silicon solar cells using porous silicon.Sol Energy Mater 物理学报，2008,57(1)：514) Sol Cells,2009,93(3):297 [9] Sheehy M A,Tull B R,Friend C M,et al.Chalcogen doping of 4]Green M A,Zhao J,Wang A,et al.Progress and outlook for silicon via intense femtosecond-aser irradiation.Mater Sci Eng B, high-efficiency crystalline silicon solar cells.Sol Energy Mater Sol 2007,137(13):289 Cel,2001,65(14):9 [10]Yuan H C,Yost V E,Page M R,et al.Efficient black silicon [5]Strumpel C,MeCann M.Modifying the solar spectrum to enhance solar cell with a density-graded nanoporous surface:optical proper- silicon solar cell efficiency:an overview of available materials.Sol ties,performance limitations,and design rules.Appl Phys Lett, Energy Mater Sol Cells,2007,91(4):238 2009,95:article No.123501北 京 科 技 大 学 学 报 第 33 卷 图 6 黑硅 μ--PCD 图( a) 及少数载流子寿命分布图( b) Fig． 6 μ-PCD diagram ( a) and life plot of minority carriers ( b) of black silicon 参 考 文 献 ［1］ Dobrzański L A，Drygaa A． Laser texturization in technology of multicrystalline silicon solar cells． J Achiev Mater Manuf Eng， 2008，29( 1) : 7 ［2］ Liang Z C，Chen D M，Liang X Q，et al． Crystalline Si solar cells based on solar grade silicon materials． Renew Energy，2010，35: 2297 ［3］ Vitanov P，Goranova E，Stavrov V，et al． Fabrication of buried contact silicon solar cells using porous silicon． Sol Energy Mater Sol Cells，2009，93( 3) : 297 ［4］ Green M A，Zhao J，Wang A，et al． Progress and outlook for high-efficiency crystalline silicon solar cells． Sol Energy Mater Sol Cells，2001，65( 1-4) : 9 ［5］ Strumpel C，McCann M． Modifying the solar spectrum to enhance silicon solar cell efficiency: an overview of available materials． Sol Energy Mater Sol Cells，2007，91( 4) : 238 ［6］ Garnett E，Yang P． Light trapping in silicon nanowire solar cells． Nano Lett，2010，10: 1082 ［7］ Lee C，Koker L，Kolasinski K W． A novel optical technique for the estimation of porosity in porous silicon thin films． Appl Phys A， 2000，71: 77 ［8］ Liu G Y，Tan X W，Yao J C，et al． “Black silicon”antireflection thin film prepared by electrochemical etching． Acta Phys Sin， 2008，57( 1) : 514 ( 刘光友，谭兴文，姚金才，等． 电化学制备薄黑硅抗反射膜． 物理学报，2008，57( 1) : 514) ［9］ Sheehy M A，Tull B R，Friend C M，et al． Chalcogen doping of silicon via intense femtosecond-laser irradiation． Mater Sci Eng B， 2007，137( 1-3) : 289 ［10］ Yuan H C，Yost V E，Page M R，et al． Efficient black silicon solar cell with a density-graded nanoporous surface: optical proper￾ties，performance limitations，and design rules． Appl Phys Lett， 2009，95: article No． 123501 ·622·