研究生课程教学大纲 2.4 Microfluidic MEMS Devices(8 class hours) In this section,we will study the mechanisms of microscale and nanoscale fluidic devices, including DNA analysis chip,microTAS,micropump,microvalve,etc. 2.5 Optical MEMS Devices(6 class hours) In this section,we will learn the typical devices of optical MEMS,such as micro-mirror, micro-grating,micro-lens,optical switch,etc. 2.6 Flexible Micro/Nano Energy Harvesting(8 class hour) In this section,we will study the principles of micro/nano energy harvesting technology,and several typical techniques will be introduced.The micro/nano energy harvesters based on piezoelectric effect,electromagnetic effect,photovoltaic effect,triboelectric effect will be systematically studied. 2.7 Package and Integration(4 class hours) Eventually,we will learn the package and integration technology of MEMS devices. 3.Teaching Methods Class teaching+Project training 4.Evaluation and Grading Final exam:One-page-open test Score:50%presence check and group project+50%final exam 5.Teaching Materials &References(Including Author,Title,Publisher and Publishing Time) [1]Gregory T.A.Kovacs.Micromachined Transducers Sourcebook [M].McGraw-Hill Science, 1998. 参考资料： [1山张海霞，缪旻，方东明.射频微机电系统的理论、设计、制备及应用M.科学出版 社，2014 [2]王中林（著）.王中林，秦勇，胡又凡（译）.自驱动系统中的纳米发电机M.科 学出版社，2012. 4研究生课程教学大纲 4 2.4 Microfluidic MEMS Devices (8 class hours) In this section, we will study the mechanisms of microscale and nanoscale fluidic devices, including DNA analysis chip, microTAS, micropump, microvalve, etc. 2.5 Optical MEMS Devices (6 class hours) In this section, we will learn the typical devices of optical MEMS, such as micro-mirror, micro-grating, micro-lens, optical switch, etc. 2.6 Flexible Micro/Nano Energy Harvesting (8 class hour) In this section, we will study the principles of micro/nano energy harvesting technology, and several typical techniques will be introduced. The micro/nano energy harvesters based on piezoelectric effect, electromagnetic effect, photovoltaic effect, triboelectric effect will be systematically studied. 2.7 Package and Integration (4 class hours) Eventually, we will learn the package and integration technology of MEMS devices. 3. Teaching Methods Class teaching + Project training 4. Evaluation and Grading Final exam: One-page-open test Score: 50% presence check and group project + 50% final exam 5. Teaching Materials &References (Including Author, Title, Publisher and Publishing Time) [1] Gregory T.A.Kovacs. Micromachined Transducers Sourcebook [M]. McGraw-Hill Science, 1998. 参考资料： [1] 张海霞，缪旻，方东明. 射频微机电系统的理论、设计、制备及应用 [M]. 科学出版 社，2014. [2] 王中林（著）. 王中林，秦勇，胡又凡 （译）. 自驱动系统中的纳米发电机 [M]. 科 学出版社，2012