研究生课程教学大纲 0208097010 Syllabus of Flexible MEMS Technology and Integration Course Class 0208097010 40 Code Hours Course Flexible MEMS Technology and Course ▣Degree Name Integration ☑Non-Degreel☐ Credit 2 Nature Others Semester ( )Fal/(☑)Spring Students (☑)Master/(☑)Ph.D Discipline Electronic Science and Engineering,Material Science Prerequisites Circuit Principle,College Physics School School of Electronic Science and Engineering Written by Xiaosheng Zhang Reviewed by Jingfu Bao Date May 2018 1.Course Objectives This Course is a non-degree selective course for master and Ph.D.students in the fields of electronic science and engineering,as well as materials science.The purpose of this course is helping students understand the principle of micro-electro-mechanical systems (MEMS), establishing the basis of flexible MEMS technology and integration,and eventually the students could prepare themselves very well for working in the related areas.Through the study of this course, the students will know the key aspects of flexible MEMS technology,including mechanisms, principles,methods,fabrications,etc.,and then possess the ability of analyzing and designing flexible MEMS devices and systems. 2.Course Content and Requirements 2.1 Background(2 class hours) In this section,we will introduce the developing history and the future tendency of MEMS technology 2.2 Flexible MEMS Fabrication(4 class hours) In this section,we will study the fabrication processes of MEMS devices,especially the technology for the preparation of flexible MEMS devices,such as photolithography,wet etching, dry etching,pattern transfer,LPCVD,PECVD,DRIE,RIE,and so on. 2.3 RF MEMS Devices(8 class hours) In this section,we will learn the working principle of radio-frequency (RF)MEMS devices, including switch,capacitor,inductor,filter,resonator,and so on.And then,the development tendency of RF MEMS technology will be introduced. 3研究生课程教学大纲 3 0208097010 Syllabus of Flexible MEMS Technology and Integration Course Code 0208097010 Course Name Flexible MEMS Technology and Integration Class Hours 40 Course Nature □Degree ☑Non-Degree□ Others Credit 2 Semester ( )Fall/( ☑ )Spring Students (☑ )Master/( ☑ )Ph.D Discipline Electronic Science and Engineering, Material Science Prerequisites Circuit Principle, College Physics School School of Electronic Science and Engineering Written by Xiaosheng Zhang Reviewed by Jingfu Bao Date May 2018 1. Course Objectives This Course is a non-degree selective course for master and Ph.D. students in the fields of electronic science and engineering, as well as materials science. The purpose of this course is helping students understand the principle of micro-electro-mechanical systems (MEMS), establishing the basis of flexible MEMS technology and integration, and eventually the students could prepare themselves very well for working in the related areas. Through the study of this course, the students will know the key aspects of flexible MEMS technology, including mechanisms, principles, methods, fabrications, etc., and then possess the ability of analyzing and designing flexible MEMS devices and systems. 2. Course Content and Requirements 2.1 Background (2 class hours) In this section, we will introduce the developing history and the future tendency of MEMS technology. 2.2 Flexible MEMS Fabrication (4 class hours) In this section, we will study the fabrication processes of MEMS devices, especially the technology for the preparation of flexible MEMS devices, such as photolithography, wet etching, dry etching, pattern transfer, LPCVD, PECVD, DRIE, RIE, and so on. 2.3 RF MEMS Devices (8 class hours) In this section, we will learn the working principle of radio-frequency (RF) MEMS devices, including switch, capacitor, inductor, filter, resonator, and so on. And then, the development tendency of RF MEMS technology will be introduced