路俊虎等：基于驻极体静电俘能器的优化设计与实验测试 ·499· 4]Beeby S P,Tudor M J,White N M.Energy harvesting vibration Crovetto A,Wang F,Hansen 0.Modeling and optimization of an sources for microsystems applications.Meas Sci Technol,2006,17 electrostatic energy harvesting device.J Microelectromech Syst, (12):R175 2014,23(5):1141 [5]Anton S R,Sodano H A.A review of power harvesting using pie- [10]Chiu Y,Lee Y C.Flat and robust out-of-plane vibrational elec- zoelectric materials (2003-2006).Smart Mater Struct,2007,16 tret energy harvester.J Micromech Microeng,2013,23 (1): (3):R1 015012 [6]Li P,Gao S Q,Cai H T.Modeling and analysis of hybrid piezoe- [11]Asanuma H,Hara M,Oguchi H,et al.Air gap optimization for lectric and electromagnetic energy harvesting from random vibra- output power and band width in outof-plane vibration energy har- tions.Microsyst Technol,2015,21(2):401 vesters employing electrets.J Micromech Microeng,2015,25 Williams C B,Yates R B.Analysis of a micro-electric generator (10)：104013 for microsystems.Sens Actuators A,1996,52(13):8 [12]Tang B.Research on Vibration Electret-Based Electrostatic Micro [8]Challa V R.Prasad M G,Fisher F T.A coupled piezoelectric- Generator.Chongqing:Chongqing University,2008 electromagnetic energy harvesting technique for achieving increased (唐彬.基于驻极体的振动式静电微型发电机研究[学位论 power output through damping matching.Smart Mater Struct, 文].重庆：重庆大学，2008) 2009,18(9):95029路俊虎等: 基于驻极体静电俘能器的优化设计与实验测试 ［4］ Beeby S P，Tudor M J，White N M． Energy harvesting vibration sources for microsystems applications． Meas Sci Technol，2006，17 ( 12) : Ｒ175 ［5］ Anton S Ｒ，Sodano H A． A review of power harvesting using pie￾zoelectric materials ( 2003—2006) ． Smart Mater Struct，2007，16 ( 3) : Ｒ1 ［6］ Li P，Gao S Q，Cai H T． Modeling and analysis of hybrid piezoe￾lectric and electromagnetic energy harvesting from random vibra￾tions． Microsyst Technol，2015，21( 2) : 401 ［7］ Williams C B，Yates Ｒ B． Analysis of a micro-electric generator for microsystems． Sens Actuators A，1996，52( 1-3) : 8 ［8］ Challa V Ｒ，Prasad M G，Fisher F T． A coupled piezoelectric￾electromagnetic energy harvesting technique for achieving increased power output through damping matching． Smart Mater Struct， 2009，18( 9) : 95029 ［9］ Crovetto A，Wang F，Hansen O． Modeling and optimization of an electrostatic energy harvesting device． J Microelectromech Syst， 2014，23( 5) : 1141 ［10］ Chiu Y，Lee Y C． Flat and robust out-of-plane vibrational elec￾tret energy harvester． J Micromech Microeng，2013，23 ( 1 ) : 015012 ［11］ Asanuma H，Hara M，Oguchi H，et al． Air gap optimization for output power and band width in out-of-plane vibration energy har￾vesters employing electrets． J Micromech Microeng，2015，25 ( 10) : 104013 ［12］ Tang B． Ｒesearch on Vibration Electret-Based Electrostatic Micro Generator． Chongqing: Chongqing University，2008 ( 唐彬． 基于驻极体的振动式静电微型发电机研究［学位论 文］． 重庆: 重庆大学，2008) · 994 ·