Ultra-high vacuum chambers p<10-8 Torr demands Stainless steel chamber Bakeable to150°C Turbo, ion, cryo pumps 6.152J3.155J6.152J/3.155J 3 p < 10-8 Torr demands: Stainless steel chamber Bakeable to 150oC Turbo, ion, cryo pumps Ultra-high vacuum chambers