Knudson number≈1 0.01cm P=10-10 106 10 10-2 100Torr 23 Log[n(#/m5)] 21 I At 0.1MP 760mm 14 lb/in2 Sputtering CVD 15 vaporation Log[P(N/m2) Ballistic. molecular flOw AL>> Generally /L<I High purity films Films less pure Epita Epitaxy is rare 6.152J3.155J6.152J/3.155J 4 -6 -4 -2 0 2 4 Log[P (N/m2)] 25 23 Log[n (#/m3)] 21 19 17 15 λ = 10 0.01 cm p = 10-10 10-8 10-6 10-4 10-2 100 Torr 1 Atm= 0.1 MPa 760 mm ≈14 lb/in2 Generally λ/L < 1 Films less pure Epitaxy is rare Evaporation Ballistic, molecular flow, λ/L >> 1 High purity films Epitaxy Sputtering CVD Knudson number ≈ 1