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3)Oxidation(20 points) a) Describe why Sio2 grows on Si at the Si/SiO2 interface, not at the SiO2/gas nterface b)(i Briefly describe the physical processes occurring at J1, J2 and J3 in the figure below Dead SiO C J1 J2 JC Name: ___________________________ 3) Oxidation (20 points) a) Describe why SiO2 grows on Si at the Si / SiO2 interface, not at the SiO2 / gas interface. b) (i) Briefly describe the physical processes occurring at J1, J2 and J3 in the figure below. Dead J1 layer J3 gas SiO2 Si J2 C 5
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