Effect of different atoms 001 B Fluorine(F)as a stabilizing agent (101) A >Binds strongly to Ti >Significantly lowers the surface energy Preserve(001)facets 1.2 8 001 B/A 0-101 6 0.9 -D-Sco:/S 4 oney 0.6 2 0.3 0.0 口中0中0 -2clean HBCNOF SIPS CIBr I Clean HB C NO F SiP S CIBr I X XEffect of different atoms Fluorine (F) as a stabilizing agent  Binds strongly to Ti  Significantly lowers the surface energy  Preserve (001) facets