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6.12J/3.155J Microelectronic processing So it is worth exploring the limits of Nano-lithography, nano-patterning self-assembly not just for semiconductor devices but for magnetics as well Dec.10,2003D e c. 10 , 2 0 0 3 6.12J / 3.155J Microelectronic processing So it is worth exploring the limits of Nano-lithography, nano-patterning, self-assembly not just for semiconductor devices but for magnetics as well…
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