Microelectronics Processing technology Fall Term 2003 Instructions for the mems Lab report Your lab report should follow the format of the IEEE Electron Device Letters. The format from the IC Lab report will be used Contents: Your Letter should include the following sections

Covers materials in lectures from 10/15 through 11/26 Does not include Lab Lectures A formula sheet will be provided (if needed) Lecture on Monday, Dec. 8th Lab tour of Analog Devices MEMS Facility We will leave from the classroom at 2: 35PM SHARP

We saw how dopants were introduced into a wafer by using diffusion (predepositionanddrive-in') This process is limited cannot exceed solid solubility of dopant -difficult to achieve light dopin Ion implantation is preferred because controlled, low or high dose can be

Why spend a whole lecture on oxidation of Si? Ge has high ue, Wh, Ge stable but no oxide GaAs has high ue and direct band Why sio? Sio, is stable down to 10 9 Torr. T>900C Sio can be etched with hf which leaves si unaffected

Review Conditional pdf Let(Y1,., YN) have joint pdf f(31,.. JN). Let f(3J+1, .. yN)be the marginal pdf of(y+1,……,YN). The conditional pdf of y1,…, Y, given y+1,…, YN is defined by

在英语句子的词序方面主语在前谓语 动词在后的句子是最基本的结构。如果把 谓语动词放在主语之前,就叫做倒装结构。 这种结构可以分为全部倒装(complete inversion)和部分倒装(partial inversion)两种 前者是指整个谓语动词部分放在主语之前 后者指助动词.情态动词或系动词be等放在 主语之前

The scope of pediatrics Pediatrics is the study of growth and development of the child from the genetic background and moment of conception through adolescence. It is the science and art of prevention, diagnosis, and treatment of the diseases of children from birth through adolescence, whether these disturbances be physical, mental, or emotional

Chapter 6 Ion-exchange and electrodialysis ALISTAIR S. GRANDISON, Department of Food Science and Technology, The University of Reading, Reading RG6 6AP, UK Ion-exchange and electrodialysis are distinct methods of separation, but can conveniently be treated together, as the basic criterion for separation in both cases is the molecular

2. Money plays a key role in the performance of the economy. The amount of money in the economy should not be too little or too much, but just“right?

Valuation of Swaps The standard approach is to assume that forward rates will be realized This works for plain vanilla interest rate and plain vanilla currency swaps, but does not necessarily work for non- standard swaps