Generated by Foxit PDF Creator Foxit Software ttp//www.foxitsoftware.comForevaluationonly WI DRAM单元结构:叠置电容 电容极板 存储结点 Insulating Layer Cell plate Capacitor dielectric lay n BL Transfer gate Isolation p-si Storage electrode ■垂直方向:向上拓 展空间 Stacked-capacitor Cell10 DRAM单元结构：叠置电容  垂直方向：向上拓 展空间 Stacked-capacitor Cell Cell plate Capacitor dielectric layer Word line Insulating Layer IsolationTransfer gate Storage electrode 点 X Generated by Foxit PDF Creator © Foxit Software http://www.foxitsoftware.com For evaluation only