glass VLSI Technology: Multilayer Al metal plus w plugs Note use of chemical-mechanical polishing to planarize surface 3.155J/6.152J 28 国四 oxide 116918.0kVx11.k:3i VLSI Technology: Multilayer Al metal plus W plugs 11/17/03 3.155I6.152J1mm oxide VLSI Technology: Multilayer Al metal plus W plugs. 11/17/03 3.155J/6.152J 29 15 1mm glass Al spin-on glass W VLSI Technology: Multilayer Al metal plus W plugs. Note use of chemical-mechanical polishing to planarize surface. 11/17/03 3.155J/6.152J 28