Can Lithography get you there? Proximity lithography 6.12J/3.155J Microelectronic processing OBJECT PLACEHOLDER This object has been removed because it is not by MIT. It may be reinstated future Fresnel (near field diffraction): n<g< W2/n Minimum resolved feature =(g) For g= 20 microns, A=436 nm=>3 microns Dec.10,2003D e c. 10 , 2 0 0 3 6.12J / 3.155J Microelectronic processing Fresnel (near field diffraction): l < g < W2/ l Minimum resolved feature = (lg)1/2 Can Lithography get you there? Proximity lithography For g = 20 microns, l = 436 nm => 3 microns OBJECT PLACEHOLDER This object has been removed because it is not owned by MIT. It may be reinstated or replaced in future