How small can you go with semiconductors?. with lithography? 6.12J/3.155J Microelectronic processing Lithography limitations fresnel and fraunhoffer limitations other light sources or particles? When the optical resolution exceeds physical resolution e-beam, secondary generation blurs lines Particle dama Dec.10,2003D e c. 10 , 2 0 0 3 6.12J / 3.155J Microelectronic processing How small can you go with semiconductors?…with lithography? Lithography limitations: w Fresnel and Fraunhoffer limitations w Other light sources or particles? w When the optical resolution exceeds physical resolution w e-beam, secondary generation blurs lines w Particle damage