How to characterize chemical composition? ·Classical methods -Wet chemistry:turn into a solution Spectroscopy methods -XRF,FTIR,XPS,EDS,SIMS,ICP-MS,WDS. EELS etc -Spatial resolution of the methods?- 4How to characterize chemical composition? • Classical methods – Wet chemistry: turn into a solution • Spectroscopy methods – XRF, FTIR, XPS, EDS, SIMS, ICP-MS, WDS, EELS etc • Spatial resolution of the methods? 4