Important signals in analytical electron microscopy High energy particle X-ray Incident high kV beam Electron etc of electrons Backscattered e Secondary e (SE) Characteristic (BSE) x-rays Auger e Visible light Bulk(SEM) Absorbed e← e-hole pairs Foil (TEM) Bremsstrahlung X-rays (noise) Elastically Inelastically Interaction scattered e- scattered e- Volume Direct (transmitted) beam Characteristic X-rays constitute a fingerprint of the local chemistry. 5Important signals in analytical electron microscopy Characteristic X 5 -rays constitute a fingerprint of the local chemistry. High energy particle X-ray Electron etc