·212 北京科技大学学报 2005年第2期 工艺可以获得性能比较稳定的8YSZ电解质薄 科学出版社，2003 片，这为平板式SOFC在中国的快速发展做好了 [3]曹茂盛，关长斌，徐甲强.纳米材料导论.哈尔滨：哈尔滨 工业大学出版社，2001 材料上的准备. [④曾凡，胡永平.矿物加工颗粒学，徐州：中国矿业大学出版 社，1995 参考文献 [⑤】中国科学院半导体研究所理化分析中心研究室。半导体 [1]Minh NQ.Takahashi T.Science and Technology of Aramic Full 的检测与分析.北京：科学出版社，1984 Alls.Elsevier Science B V,1995 句布橹克·理查德J.陶瓷工艺.清华大学新型陶瓷与精细 [2]韩敏芳，彭苏萍，固体氧化物燃料电池材料及制备.北京： 工艺国家重点实验室译.北京：科学出版社，1998 Manufacture and properties of 8YSZ electrolyte thin film by tape casting HAN Minfang,WANG Yugian,LI Botao,PENG Suping China University of Mining and Technology,Beijing 100083,China ABSTRACT YSZ electrolyte thin films were prepared by tape casting from nanocrystalline powder.The proper- ties of YSZ nanocrystalline powder,adobe by tape casting and sintered thin films were analyzed.The YSZ nanoc- rystalline powder has a narrow size distribution of 0.1-0.2 um and the median size is 0.157 um.The beginning shrinkage temperature of the YSZ nano-powder is 968.9C from its sintering curve.The highest shrinkage rate ap- pears at 1279.9C,and by 1400'C the shrinkage rate is stable,almost up to 20%.The adobe by tape casting has high density and its relative density is up to 64.1%.The relative density of the sintered YSZ thin films is 97.8%.The grain size of YSZ is in the range of 1-4 um,which show uniform with the microstructure by SEM,as well as grain boun- daries are obvious.The YSZ thin films show good electrical properties with increasing temperature and their con- ductivity is 0.106 S/cm at 900C. KEY WORDS nano-powder;tape casting process;electrolyte thin film;sintering property @滋西型酒或运阳设泄酒道@面@r碰没议或戒女@液酒减液包@@藏运酒盛@酒强国如碰液或回或@酒减密医酒 (上接第208页) Deposition technology and properties of chromium oxide coatings by RF reactive sputtering XIONG Xiaotao,YAN Liangchen,YANG Huisheng,WANG Yangbin Department of Materials Physics and Chemistry,Univ.of Science and Technology,Beijing,Beijing 100083,China ABSTRACT The RF reactive sputtering method was used to deposit wear resistant chromium oxide coatings and the properties of the coatings were studied.The results showed that there existed two modes of sputtering during RF reactive sputtering,i.e.,metal sputtering mode and nonmetal sputtering mode caused by the reaction between the target and reactive gas.The deposition rate was very low in the nonmetal sputtering mode.The hardness of chro- mium oxide coatings depends mainly on the content of CrO,in the coatings and low hardness CrO will form when oxygen is not enough during sputtering.Feeding oxygen near the substrate is an efficient technology for depositing hard chromium oxide coatings at high deposition rate. KEY WORDS chromium oxide;hard coating;magnetron sputtering;mechanical property一 2 1 2 - 北 京 科 技 大 学 学 报 2 0 0 5 年 第 2 期 工 艺可 以获 得 性 能 比 较 稳 定 的 SY S Z 电解质 薄 片 , 这 为平 板 式 S O F C 在 中 国的快 速 发 展做 好 了 材料 上 的准 备 . 考 文 献 M ihn N Q , 卫永ah a s h i T S e i e n c e a n d eT e lm o l o gy o f iA am i e F u ll lA l s 、 E l s ve i e r S e i e cn e B 矶 19 9 5 韩 敏芳 , 彭苏萍 . 固体氧 化物 燃料 电池 材料 及制 备 . 北京 : 科 学 出 版社 , 2 0 03 3[ l 曹茂 盛 , 关长 斌 , 徐 甲强 . 纳 米材 料 导论 , 哈 尔滨 : 哈 尔滨 工 业大 学 出版社 , 20 01 4[ 1 曾凡 , 胡 永平 . 矿 物加工颗 粒 学 , 徐 州 : 中 国矿 业 大学 出版 社 , 29 9 5 5[ 」 中国科 学 院半导 体研 究所 理化 分析 中心 研 究室 . 半 导体 的检测 与分 析 , 北 京 : 科学 出 版社 , 19 84 6[] 布 鲁克 · 理查 德 · J . 陶瓷 工艺 . 清 华大 学新型陶 瓷与 精细 工 艺 国家重 点实 验室 译 , 北 京 : 科 学 出版 社 , 19 98 参l2[] M a nu af c tur e an d P r o P e rt i e s o f SY S Z e l e c tr o lyt e ht i n if lm b y t ap e c a s t i n g 瓦咬N iM 叹of gn, 删刃 G uY iq a ,n LI B o at 口 , 尸五脚G S Z切 in g hC in a U 刀 iV ers ity o f M in in g 即d eT c 】功 o l o gy, B e ij in g 1 0 0 0 83 , C b i 们a A B s T R A e T Y s z e l e c tr o lyt e ht in if lm s w e r e p r e p ar e d b y t即e c a s t i雌 fr o m n an o 呷 s t al i n e p o w d e L hT e p r叩 e r - t i e s o f Y S Z n an o e 巧s t al li n e P o w d e r, ad o b e by t ap e c a s t ign an d s i nt er d ht in if lm s wer e an a l y z e d . hT e Y S Z n an o e - yt s t a l li n e P o w d e r h a s a n ar o w s i Z e d i s tr ib ut i o n o f 0 . 1一 0 · 2 “ 111 an d ht e m e d ian s i Z e 1 5 0 · 1 5 7 林n l . 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K E Y W O R D S n an o 一 P o dw er : t ap e e a s t in g P r o e e s s : e l e e tr o lyt e ht i n if lm : s int e r i n g Por P e勿 ( 上 接第 2 0 8 页 ) D e P o s i t i o n t e e h n o l o g y an d P r o P e rt i e s o f e hr o m i um o x i d e c o a t i n g s b y RF r e a c t i v e s P ut t e r i n g 洲 U 凸VG J iY 门 o at 口, YA N iL a 刀g c he n, YA N G H 扮is he gn, 恻刃 G aY 刀 g b in D叩 a r t们l e n t o f M at e r i a l s p勿 s i e s an d Ch e m i s以t U n .v o f S e i e n e e an d eT e lm o l o ,gy B e ij in g , B e ij in g l 0 0 0 8 3 , C卜i l l a A B S T R A C T T h e R F r e a e t iV e s P ut e r i n g m e ht o d w as u s e d t o d e P o s it w e ar er s i s t a n t e hr o m i unt o x i d e c o at i n g s an d ht e P r O P e rt i e s o f ht e e o at ing s w e r e s t u d i e d . hT e r e s ul t s hs o w e d ht at ht er e x i s t e d wt o m o d e s o f s Put ier ng d u r i n g RF r e a c ti v e s P ut e r i n g , i . e . , m e t al s Put e ir n g m o d e an d n o nm e t al s P ut e ir n g m o d e e au s e d by ht e r e a e ti o n b e 七刀 e en ht e t agr e t an d r e a e t i v e g a s . T h e d eP o s i ti o n r at e w a s v e 叮 l o w in ht e n o nm e t a l s P ut e ir gn m o d e . T h e h a r d x l e s s o f e h r o - m i um o x i d e c o at ign s d e P e n d s m ia n l y o n ht e e o nt e nt o f C乃 0 3 in ht e e o at in g s a n d l o w 】l a r d n e s s C r O w i l l fo mr w h e n o xy g e n 1 5 n o t e n o 雌h d u r ign s P ut e r i n g . F e e dign o Xy g e n n e ar ht e s ub s l r a t e 1 5 an e if e i e in t e e hn o l o gy for de P o s i t ign h ar d e hr om n u n ox i d e o o a t i n g s at h igh d eP o s it on r at e . K E Y W O R D S e】l r o m i um o x i d e : h a r d e o at in g ; m a g n e tr o n s P ut e ir gn : m e c h ian e al P r o P e yrt