Advantages of lon Implantation 1.Precise Control of Dopant Concentration 2. Good Dopant Uniformity 3.Good Control of Dopant Penetration Depth 4. Produces a pure beam of lons 5. LoW Temperature Processing 6. Ability to Implant Dopants Through Films 7. No Solid Solubility LimitAdvantages of Ion Implantation 1.Precise Control of Dopant Concentration 2.Good Dopant Uniformity 3.Good Control of Dopant Penetration Depth 4.Produces a Pure Beam of Ions 5.Low Temperature Processing 6.Ability to Implant Dopants Through Films 7.No Solid Solubility Limit