真空泵的工作范围 Ultra high high vacuum Rough vacuum vacuum Rotary vane mechanical pump Dry mechanical pump Turbomolecular pump Vapour jet(diffusion)pump lon pump Ti sublimation pump 10-12 10-10 10-8 10-6 10-4 10-2 10+2 Pressure(mbar) 中国斜学技术大学 University of Science and Technology of China 真空泵的工作范围 Rotary vane mechanical pump Dry mechanical pump Ti sublimation pump Ion pump Turbomolecular pump Vapour jet (diffusion) pump Ultra high vacuum high vacuum Rough vacuum 10-12 10-10 10-8 10-6 10-4 10-2 1 10+2 Pressure (mbar)