Lectures 12 Topical Lectures Vacuum CvD, oxidation, Diffusion /Implantation Lithography, Etching, Sputtering Evaporation, Interconnect 3 Lab overview lectures Given in first week of lab 3 Lab report lectures Given in last week of lab 5 Advanced Topic Lectures Advanced Si Devices Crystal Growth, Reliability Nanobio, Nanolithography M.A. Schmidt 315516.152]- Lecture1FA03Lectures „ 12 Topical Lectures „ Vacuum, CVD, Oxidation, Diffusion/Implantation, Lithography, Etching, Sputtering, Evaporation, Interconnect „ 3 Lab Overview Lectures „ Given in first week of lab „ 3 Lab Report Lectures „ Given in last week of lab „ 5 Advanced Topic Lectures „ Advanced Si Devices, Crystal Growth, Reliability, Nanobio, Nanolithography M.A. Schmidt 3.155J/6.152J – Lecture 1 FA03 11