Laboratory Each session is 4 hours(9-1 or 1-5) Tuesday thursday friday Groups A, B,CD,E, F each lab is 3 sessions 2 for processing, 1 for testing three labs IC MOS Capacitor MEMS: Silicon nitride microcantilever Fluids, Micromixer Lab report for each lab M.A. Schmidt 315516.152]- Lecture1FA03Laboratory „ Each session is 4 hours (9-1 or 1-5) „ Tuesday, Thursday, Friday „ Groups A,B,C,D,E,F „ Each lab is 3 sessions „ 2 for processing, 1 for testing „ Three labs „ IC : MOS Capacitor „ MEMS : Silicon Nitride Microcantilever „ Fluids : Micromixer „ Lab report for each lab M.A. Schmidt 3.155J/6.152J – Lecture 1 FA03 10