《Microelectronics Process》lecture1-1

3155/6.,15] Lecture1 Introduction Prof martin a schmidt Massachusetts Institute of Technology 9/3/2003

3.155J/6.152J Lecture 1: Introduction Prof. Martin A. Schmidt Massachusetts Institute of Technology 9/3/2003 1

Outline Introductions Staff You Motivation Course organization Handout a Lab assignments a Safety M.A. Schmidt 3155J/6.152]- Lecture1FA03

Outline „ Introductions „ Staff „ You „ Motivation „ Course Organization „ Handout „ Lab Assignments „ Safety M.A. Schmidt 3.155J/6.152J – Lecture 1 FA03 2

Tiny Technologies a definition which captures two extremes Miniaturization Making things smaller, often using integrated Circuit process technologies Atom-level Manipulation/Assembly/ Growth Often to achieve a unique material property e.g. Carbon Nanotubes We will focus on the former M.A. Schmidt 3155J/6.152]- Lecture1FA03 3

Tiny Technologies „ A definition which captures two extremes: „ Miniaturization „ Making things smaller, often using Integrated Circuit process technologies „ Atom-level Manipulation/Assembly/Growth „ Often to achieve a unique material property „ e.g. Carbon Nanotubes „ We will focus on the former M.A. Schmidt 3.155J/6.152J – Lecture 1 FA03 3

The driver microelectronics Moores law Transistors 100.000.000 Pentium(4 Processor PentiumⅢ Processor Pentium II Processor 10.00000 Pentium( Processor 486M DX Processor 1.000.000 100.000 1000 1970 1975 1980 1985 1990 1995 2 M.A. Schmidt 3155J/6.152]- Lecture1FA03

The Driver: Microelectronics M.A. Schmidt 3.155J/6.152J – Lecture 1 FA03 4

Engineering Challenges of the 20th Century INCREASING SCALE Brooklyn Bridge Space v rocket Hoover dam boeIng M.A. Schmidt 3155J/6.152]- Lecture1FA03

Engineering Challenges of the 20th Century: INCREASING SCALE Brooklyn Bridge Space V rocket Hoover Dam Boeing 747-400 M.A. Schmidt 3.155J/6.152J – Lecture 1 FA03 6

Engineering Challenges of the 21st Century DECREASING SCALE Portable Distributed Systems Manipulation of Small Things Drugs Biological Cells Biological matter DNA Proteins Atoms M.A. Schmidt 3155J/6.152]- Lecture1FA03

Engineering Challenges of the 21st Century: DECREASING SCALE „ Portable, Distributed Systems „ Manipulation of Small Things „ Drugs „ Biological Cells „ Biological Matter „ DNA „ Proteins „ Atoms M.A. Schmidt 3.155J/6.152J – Lecture 1 FA03 7

MIT Tiny Technologies Low Power dsP Transistors Chandrakasan) (delAlamo Microengines illia Microchemical 83178625XY8”3d Plants(Jensen) Biosensors Connectors (Manalis (Slocum) M.A. Schmidt 315516.152]- Lecture 1 FA03

M.A. Schmidt 3.155J/6.152J – Lecture 1 FA03 8 MIT Tiny Technologies mm Pm nm Microengines Microchemical Plants(Jensen) Low Power DSP (Chandrakasan) Transistors (delAlamo) Connectors (Slocum) Biosensors (Manalis)

Organization a Pre-Req Total overhaul since last year Spring 03 was trial run Three lab modules IC MEMS Microf|udⅰcs Lecture alignment with labs M.A. Schmidt 3155J/6.152]- Lecture1FA03

Organization „ Pre-Req „ Total overhaul since last year „ Spring ’03 was trial run „ Three lab modules „ IC „ MEMS „ Microfluidics „ Lecture alignment with labs M.A. Schmidt 3.155J/6.152J – Lecture 1 FA03 9

Laboratory Each session is 4 hours(9-1 or 1-5) Tuesday thursday friday Groups A, B,CD,E, F each lab is 3 sessions 2 for processing, 1 for testing three labs IC MOS Capacitor MEMS: Silicon nitride microcantilever Fluids, Micromixer Lab report for each lab M.A. Schmidt 315516.152]- Lecture1FA03

Laboratory „ Each session is 4 hours (9-1 or 1-5) „ Tuesday, Thursday, Friday „ Groups A,B,C,D,E,F „ Each lab is 3 sessions „ 2 for processing, 1 for testing „ Three labs „ IC : MOS Capacitor „ MEMS : Silicon Nitride Microcantilever „ Fluids : Micromixer „ Lab report for each lab M.A. Schmidt 3.155J/6.152J – Lecture 1 FA03 10

Lectures 12 Topical Lectures Vacuum CvD, oxidation, Diffusion /Implantation Lithography, Etching, Sputtering Evaporation, Interconnect 3 Lab overview lectures Given in first week of lab 3 Lab report lectures Given in last week of lab 5 Advanced Topic Lectures Advanced Si Devices Crystal Growth, Reliability Nanobio, Nanolithography M.A. Schmidt 315516.152]- Lecture1FA03

Lectures „ 12 Topical Lectures „ Vacuum, CVD, Oxidation, Diffusion/Implantation, Lithography, Etching, Sputtering, Evaporation, Interconnect „ 3 Lab Overview Lectures „ Given in first week of lab „ 3 Lab Report Lectures „ Given in last week of lab „ 5 Advanced Topic Lectures „ Advanced Si Devices, Crystal Growth, Reliability, Nanobio, Nanolithography M.A. Schmidt 3.155J/6.152J – Lecture 1 FA03 11