3155/6.,15] Lecture1 Introduction Prof martin a schmidt Massachusetts Institute of Technology 9/3/2003
3.155J/6.152J Lecture 1: Introduction Prof. Martin A. Schmidt Massachusetts Institute of Technology 9/3/2003 1
Outline Introductions Staff You Motivation Course organization Handout a Lab assignments a Safety M.A. Schmidt 3155J/6.152]- Lecture1FA03
Outline Introductions Staff You Motivation Course Organization Handout Lab Assignments Safety M.A. Schmidt 3.155J/6.152J – Lecture 1 FA03 2
Tiny Technologies a definition which captures two extremes Miniaturization Making things smaller, often using integrated Circuit process technologies Atom-level Manipulation/Assembly/ Growth Often to achieve a unique material property e.g. Carbon Nanotubes We will focus on the former M.A. Schmidt 3155J/6.152]- Lecture1FA03 3
Tiny Technologies A definition which captures two extremes: Miniaturization Making things smaller, often using Integrated Circuit process technologies Atom-level Manipulation/Assembly/Growth Often to achieve a unique material property e.g. Carbon Nanotubes We will focus on the former M.A. Schmidt 3.155J/6.152J – Lecture 1 FA03 3
The driver microelectronics Moores law Transistors 100.000.000 Pentium(4 Processor PentiumⅢ Processor Pentium II Processor 10.00000 Pentium( Processor 486M DX Processor 1.000.000 100.000 1000 1970 1975 1980 1985 1990 1995 2 M.A. Schmidt 3155J/6.152]- Lecture1FA03
The Driver: Microelectronics M.A. Schmidt 3.155J/6.152J – Lecture 1 FA03 4
Engineering Challenges of the 20th Century INCREASING SCALE Brooklyn Bridge Space v rocket Hoover dam boeIng M.A. Schmidt 3155J/6.152]- Lecture1FA03
Engineering Challenges of the 20th Century: INCREASING SCALE Brooklyn Bridge Space V rocket Hoover Dam Boeing 747-400 M.A. Schmidt 3.155J/6.152J – Lecture 1 FA03 6
Engineering Challenges of the 21st Century DECREASING SCALE Portable Distributed Systems Manipulation of Small Things Drugs Biological Cells Biological matter DNA Proteins Atoms M.A. Schmidt 3155J/6.152]- Lecture1FA03
Engineering Challenges of the 21st Century: DECREASING SCALE Portable, Distributed Systems Manipulation of Small Things Drugs Biological Cells Biological Matter DNA Proteins Atoms M.A. Schmidt 3.155J/6.152J – Lecture 1 FA03 7
MIT Tiny Technologies Low Power dsP Transistors Chandrakasan) (delAlamo Microengines illia Microchemical 83178625XY8”3d Plants(Jensen) Biosensors Connectors (Manalis (Slocum) M.A. Schmidt 315516.152]- Lecture 1 FA03
M.A. Schmidt 3.155J/6.152J – Lecture 1 FA03 8 MIT Tiny Technologies mm Pm nm Microengines Microchemical Plants(Jensen) Low Power DSP (Chandrakasan) Transistors (delAlamo) Connectors (Slocum) Biosensors (Manalis)
Organization a Pre-Req Total overhaul since last year Spring 03 was trial run Three lab modules IC MEMS Microf|udⅰcs Lecture alignment with labs M.A. Schmidt 3155J/6.152]- Lecture1FA03
Organization Pre-Req Total overhaul since last year Spring ’03 was trial run Three lab modules IC MEMS Microfluidics Lecture alignment with labs M.A. Schmidt 3.155J/6.152J – Lecture 1 FA03 9
Laboratory Each session is 4 hours(9-1 or 1-5) Tuesday thursday friday Groups A, B,CD,E, F each lab is 3 sessions 2 for processing, 1 for testing three labs IC MOS Capacitor MEMS: Silicon nitride microcantilever Fluids, Micromixer Lab report for each lab M.A. Schmidt 315516.152]- Lecture1FA03
Laboratory Each session is 4 hours (9-1 or 1-5) Tuesday, Thursday, Friday Groups A,B,C,D,E,F Each lab is 3 sessions 2 for processing, 1 for testing Three labs IC : MOS Capacitor MEMS : Silicon Nitride Microcantilever Fluids : Micromixer Lab report for each lab M.A. Schmidt 3.155J/6.152J – Lecture 1 FA03 10
Lectures 12 Topical Lectures Vacuum CvD, oxidation, Diffusion /Implantation Lithography, Etching, Sputtering Evaporation, Interconnect 3 Lab overview lectures Given in first week of lab 3 Lab report lectures Given in last week of lab 5 Advanced Topic Lectures Advanced Si Devices Crystal Growth, Reliability Nanobio, Nanolithography M.A. Schmidt 315516.152]- Lecture1FA03
Lectures 12 Topical Lectures Vacuum, CVD, Oxidation, Diffusion/Implantation, Lithography, Etching, Sputtering, Evaporation, Interconnect 3 Lab Overview Lectures Given in first week of lab 3 Lab Report Lectures Given in last week of lab 5 Advanced Topic Lectures Advanced Si Devices, Crystal Growth, Reliability, Nanobio, Nanolithography M.A. Schmidt 3.155J/6.152J – Lecture 1 FA03 11
