中国科学技术大学物理系微电子专业 Milestones in vls One-transistor DRAM cell invented First bipolar (1968) transistor (1947) First MOSFET (1960) VLSI Era 194019501960 19 198019902000 CMOS invented IC(1963)First Micro in vented processor (1958) (1971 Semiconductor Devices 2021/2/4中国科学技术大学物理系微电子专业 2021/2/4 Semiconductor Devices 22