·268· 工程科学学报，第41卷，第2期 析.在分析过程中综合运用数学建模、启发式算法、 conveyor-based automated material handling system with crossovers 排队论的相关知识，基于综合因素对系统的捷径使 in semiconductor wafer fabs.IEEE Trans Semicond Manuf,2010, 用作出决策.通过Matlab仿真实验可以得出结论： 23(3):468 [7]Zhou B H,Chen J X.Queuing-based performance analytical mod- (1)基于重试搬运策略的物料搬运系统在降低系统 el for continuous flow transporters of AMHS.J Donghua Univ 在制品数量方面是有效的，起到了降低在制品数量 (English Ed),2013,30(2):90 和捷径成本的作用，提升了生产效率并降低了企业 [8]Chen J X,Zhou B H.Performance analysis for continuous AMHS 的生产成本：(2)通过仿真实验完善了基于多目标 with united layout.Comput Integr Manuf Syst,2013,19 (6): 启发式算法得到的捷径使用策略，在原有的基础上 1313 (陈锦祥，周炳海.整体式品圆连续自动物料搬运系统性能分 进一步运用分类算法，总结出综合性最好的捷径 析.计算机集成制造系统，2013,19(6)：1313) 策略. [9]Wang C N,Wang Y H,Hsu H P,et al.Using rotacaster in the 在本文基础上可考虑晶圆的优先级问题，从而 heuristic preemptive dispatching method for conveyor-based materi- 更贴近实际生产过程.此外，针对晶圆制造系统的 al handling of 450 mm wafer fabrication.IEEE Trans Semicond 复杂性，如果能够对捷径的使用随着系统状态进行 Manuf,.2016,29(3):230 [10]Wang C N,Hsu H P,Tran VV.An improved dispatching meth- 动态决策，即随着区域搬运负荷的变化及捷径使用 od(a-HPDB)for automated material handling system with active 平衡性的变化进行动态调整捷径的开启与关闭，将 rolling belt for 450 mm wafer fabrication.Appl Sci,2017,7(8): 能够进一步提高效率和产能。 780 [11]Hong S,Johnson A L,Carlo HJ.et al.Optimising the location 参考文献 of crossovers in conveyor-based automated material handling sys- [1]Nadoli C.Pillai D.Simulation in automated material handling sys- tems in semiconductor wafer fabs.Int J Prod Res,2011,49 tems design for semiconductor manufacturing /Proceedings of the (20):6199 1994 Winter Simulation Conference.Lake Buena Vista,1994:892 [12]Lasrado V,Nazzal D.Design of a manufacturing facility layout [2]Davis J.450 mm wafer transition needs collaboration and stand- with a closed loop conveyor with shortcuts using queueing theory ards.Solid State Technol,2011,54(6):14 and genetic algorithms//Proceedings of the 2011 Winter Simula- [3]Pettinato J S,Pillai D.Technology decisions to minimize 450-mm tion Conference.Phoenix,2011:1964 wafer size transition risk.IEEE Trans Semicond Manuf,2005,18 [13]Zhou B H,Chen J X,Zhao M.Performance analysis for continu- (4):501 ous flow transporters of Interbay AMHS with priority rules.J Zhe- [4]Bozer Y A,Hsieh Y J.Throughput performance analysis and ma- jiang Univ Eng Sci,2015 49(2):296 chine layout for discrete-space closed-loop conveyors.IIE Trans, (周炳海，陈锦祥，赵猛.基于品圆优先级的连续型Interbay 2005,37(1):77 搬运系统性能分析.浙江大学学报（工学版），2015,49(2)： [5]Nazzal D,Johnson A,Carlo H J,et al.An analytical model for 296) conveyor based AMHS in semiconductor wafer fabs /Proceedings [14]Artalejo J R,Gomez-Corral A.Retrial Queueing Systems,A Com- of the 2008 Winter Simulation Conference.Miami,2008:2148 putational Approach.Heidelberg:Springer-Verlag Berlin Heidel- [6]Nazzal D,Jimenez J A,Carlo HJ,et al.An analytical model for berg,1999工程科学学报,第 41 卷,第 2 期 析. 在分析过程中综合运用数学建模、启发式算法、 排队论的相关知识,基于综合因素对系统的捷径使 用作出决策. 通过 Matlab 仿真实验可以得出结论: (1)基于重试搬运策略的物料搬运系统在降低系统 在制品数量方面是有效的,起到了降低在制品数量 和捷径成本的作用,提升了生产效率并降低了企业 的生产成本;(2)通过仿真实验完善了基于多目标 启发式算法得到的捷径使用策略,在原有的基础上 进一步运用分类算法,总结出综合性最好的捷径 策略. 在本文基础上可考虑晶圆的优先级问题,从而 更贴近实际生产过程. 此外,针对晶圆制造系统的 复杂性,如果能够对捷径的使用随着系统状态进行 动态决策,即随着区域搬运负荷的变化及捷径使用 平衡性的变化进行动态调整捷径的开启与关闭,将 能够进一步提高效率和产能. 参 考 文 献 [1] Nadoli G, Pillai D. Simulation in automated material handling sys鄄 tems design for semiconductor manufacturing / / Proceedings of the 1994 Winter Simulation Conference. Lake Buena Vista, 1994: 892 [2] Davis J. 450 mm wafer transition needs collaboration and stand鄄 ards. Solid State Technol, 2011, 54(6): 14 [3] Pettinato J S, Pillai D. Technology decisions to minimize 450鄄mm wafer size transition risk. IEEE Trans Semicond Manuf, 2005, 18 (4):501 [4] Bozer Y A, Hsieh Y J. Throughput performance analysis and ma鄄 chine layout for discrete鄄space closed鄄loop conveyors. IIE Trans, 2005, 37(1): 77 [5] Nazzal D, Johnson A, Carlo H J, et al. An analytical model for conveyor based AMHS in semiconductor wafer fabs / / Proceedings of the 2008 Winter Simulation Conference. Miami, 2008: 2148 [6] Nazzal D, Jimenez J A, Carlo H J, et al. An analytical model for conveyor鄄based automated material handling system with crossovers in semiconductor wafer fabs. IEEE Trans Semicond Manuf, 2010, 23(3): 468 [7] Zhou B H, Chen J X. Queuing鄄based performance analytical mod鄄 el for continuous flow transporters of AMHS. J Donghua Univ (English Ed), 2013, 30(2): 90 [8] Chen J X, Zhou B H. Performance analysis for continuous AMHS with united layout. Comput Integr Manuf Syst, 2013, 19 ( 6 ): 1313 (陈锦祥, 周炳海. 整体式晶圆连续自动物料搬运系统性能分 析. 计算机集成制造系统, 2013, 19(6): 1313) [9] Wang C N, Wang Y H, Hsu H P, et al. Using rotacaster in the heuristic preemptive dispatching method for conveyor鄄based materi鄄 al handling of 450 mm wafer fabrication. IEEE Trans Semicond Manuf, 2016, 29(3): 230 [10] Wang C N, Hsu H P, Tran V V. An improved dispatching meth鄄 od (a鄄HPDB) for automated material handling system with active rolling belt for 450 mm wafer fabrication. Appl Sci, 2017, 7(8): 780 [11] Hong S, Johnson A L, Carlo H J, et al. Optimising the location of crossovers in conveyor鄄based automated material handling sys鄄 tems in semiconductor wafer fabs. Int J Prod Res, 2011, 49 (20): 6199 [12] Lasrado V, Nazzal D. Design of a manufacturing facility layout with a closed loop conveyor with shortcuts using queueing theory and genetic algorithms / / Proceedings of the 2011 Winter Simula鄄 tion Conference. Phoenix, 2011: 1964 [13] Zhou B H, Chen J X, Zhao M. Performance analysis for continu鄄 ous flow transporters of Interbay AMHS with priority rules. J Zhe鄄 jiang Univ Eng Sci, 2015 49(2): 296 (周炳海, 陈锦祥, 赵猛. 基于晶圆优先级的连续型 Interbay 搬运系统性能分析. 浙江大学学报(工学版), 2015, 49(2): 296) [14] Artalejo J R, G佼mez鄄Corral A. Retrial Queueing Systems, A Com鄄 putational Approach. Heidelberg: Springer鄄Verlag Berlin Heidel鄄 berg, 1999 ·268·